Abstract:It is well known that, femtosecond-laser pulses are easy to spontaneously induce deep-subwavelength periodic surface structures on transparent dielectrics, but not on non-transparent semiconductors. Nevertheless, in the study we demonstrate that by high-NA 800-nm femtosecond-laser direct writing with controlling the pulse energy and scanning speed in the near-damage-threshold regime, polarization-dependent deep-subwavelength single grooves with linewidths of ~180 nm can be controllably prepared on Si. Generally, the single-groove linewidth increases slightly with the increase of pulse energy and the decrease of scanning speed, whereas the single-groove depth significantly increases from ~300 to ~600 nm with the decrease of scanning speed, or even over 1 μm with the multi-processing, indicating the characteristics of transversal clamping and longitudinal growing of such deep-subwavelength single grooves. Then, EDS composition analysis of the near-groove region confirms that the single-groove formation tends to be an ultrafast, non-thermal ablation process, and the oxidized deposits nearby the grooves are easy to clean up. Furthermore, the results showing the strong dependence of groove orientation on laser polarization, and the occurrence of double-groove structures due to the interference of pre-formed orthogonal grooves, both indicate that the extraordinary field enhancement of strong polarization sensitiveness in the deep-subwavelength groove plays an important role for single-groove growth with high stability and collimation.

Direct Writing of Sub-Wavelength Ripples on Silicon Using Femtosecond Laser at High Repetition Rate

Sub-wavelength Ripple Formation on Silicon Induced by Femtosecond Laser Radiation

Research on Periodic Structures Aroused by Femtosecond Laser Irradiation on Single-Crystalline Silicon Wafer

Discussion of the possible formation mechanism of near-wavelength ripples on silicon induced by femtosecond laser

Femtosecond Laser Induced Ripples And Nanohole Arrays On Silicon

Femtosecond Laser Induced Surface Structuring on Silicon by Diffraction-Assisted Micropatterning

Periodic Subwavelength Ripples On A Si Surface Induced By A Single Temporally Shaped Femtosecond Laser Pulse: Enhanced Periodic Energy Deposition And Reduced Residual Thermal Effect

Progressive Evolution of Silicon Surface Microstructures Via Femtosecond Laser Irradiation in Ambient Air

Ultrafast imaging on the formation of periodic ripples on a Si surface with a prefabricated nanogroove induced by a single femtosecond laser pulse.

Femtosecond Laser-Induced Cross-Periodic Structures on A Crystalline Silicon Surface under Low Pulse Number Irradiation

Unclassical ripple patterns in single-crystal silicon produced by femtosecond laser irradiation

Direct Writing Anisotropy on Crystalline Silicon Surface by Linearly Polarized Femtosecond Laser

Sub-surface Layer of Silicon Singe Crystal Periodically Nanostructured by Near-infrared Femtosecond Laser Pulses

Periodic Ripple Structures on Silicon Substrates Induced by Femtosecond Laser at Various Scan Modes

Ripple Formation in Excimer Laser-Irradiated Silicon Dioxide/silicon System

The Ripples and Nanoparticles on Silicon Irradiated by Femtosecond Laser

Dynamics Of Femtosecond Laser-Induced Periodic Surface Structures On Silicon By High Spatial And Temporal Resolution Imaging

Generation of Supra-Wavelength Grooves in Femtosecond Laser Surface Structuring of Silicon

Coalescence and dislocation of laser induced periodic ripples on silicon by double time delayed femtosecond laser beams

Surface structures induced by ultrashort laser pulses: Formation mechanisms of ripples and grooves

Deep-subwavelength single grooves prepared by femtosecond laser direct writing on Si