Field-assisted Thermally Stimulated Current of Mobile Ions in a Dielectric Layer of a Metal–oxide–semiconductor Structure

CH TAN,MZ HSU,YY WANG
DOI: https://doi.org/10.1063/1.332686
IF: 2.877
1983-01-01
Journal of Applied Physics
Abstract:A field-assisted thermally stimulated ionic current method has been used to investigate the transient currents associated with mobile ions in dielectric layers of metal-oxide-semiconductor (MOS) structures. Assuming Poole–Frenkel effect, an interface trapping model has been used to analyze J–V curves. Using a ramp voltage, analytic expressions for normalized J–V curves are obtained. The single energy model and distributed energy model have been analyzed. The most probable trapping depth of mobile ions, attempt-to-escape frequency and trapping energy distribution of mobile ions may be determined from J–V curves. The experimental results are consistent with theoretical calculations.
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