Modified Airy Function Method for Modeling of Direct Tunneling Current in Metal–oxide–semiconductor Structures

J Wang,YT Ma,LL Tian,ZJ Li
DOI: https://doi.org/10.1063/1.1403658
IF: 4
2001-01-01
Applied Physics Letters
Abstract:Using a modified Airy function (MAF) to solve the Schrödinger equation in the whole metal–oxide–semiconductor structure, a fully quantum-mechanical model of direct tunneling current from an inverted p-Si substrate through ultrathin oxides is presented. The effects of tunneling on the electrostatic potential and the distribution of electrons are also included when self-consistently solving the Schrödinger and Poisson equations in silicon. Due to the semianalytical nature of the MAF method, the model has high efficiency. Model results are compared with experimental data and show excellent agreement. Moreover, an approximately linear relationship between the logarithm of the direct tunneling current and oxide thickness is found out.
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