Abstract:Trace measurement for gas impurities plays an important role in the quality determination of pure-gases. High purity gases will certainly have a higher economic value than gases with lower purity, especially for the ultra-high purity gases used in the preparation of standard gas mixtures. These types of gases shall have a maximum limit for their impurities, which should be verified by a validated method. In this study, an experiment was conducted to determine the impurities in three cylinders of ultra-high purity nitrogen (UHP N2) gases using a validated gas chromatography equipped with pulse dicharge helium ionization detector (GC-PDHID) method. The impurities detected by the GC-PDHID in the aforementioned UHP N2 samples consist of argon (Ar), oxygen (O2), methane (CH4), and carbon monoxide (CO). Meanwhile, hydrogen (H2) and carbon dioxide (CO2) cannot be seen on the chromatogram, then assumed to be lower than the PDHID's detection limit. Concentrations of the impurities, along with their uncertainties, were found to be 0.987 ± 0.104; 5.818 ± 0.807; 3.163 ± 0.449; and 1.289 ± 0.158 μmol/mol for Ar, O2, CH4, and CO, respectively for the first N2 cylinder. H2and CO2 were estimated to be half of the limit of detection, and H2O component was quoted from the UHP N2 manufacturer's certificate of analysis. The other two N2 cylinders showed almost similar amounts of impurities. Based on the results, the actual purity for each of the three N2 gases can be estimated as 99.9987% mol/mol; 99.9987% mol/mol; and 99.9988% mol/mol. It is expected that the results of this study could useful as reference for both pure-gas manufacturers and consumers to properly determine the quality of their products.

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