Development of High-Precision NO2 Gas Sensor Based on Non-Dispersive Infrared Technology

Yongmin Zhao,Congchun Zhang,Guangteng Ci,Xiaoguang Zhao,Jinguang Lv,Jingqiu Liang,Anjie Ming,Feng Wei,Changhui Mao

DOI: https://doi.org/10.3390/s24134146

IF: 3.9

2024-06-27

Sensors

Abstract:Increasing concerns about air quality due to fossil fuel combustion, especially nitrogen oxides (NOx) from marine and diesel engines, necessitate advanced monitoring systems due to the significant health and environmental impacts of nitrogen dioxide (NO2). In this study, a gas detection system based on the principle of the non-dispersive infrared (NDIR) technique is proposed. Firstly, the pyroelectric detector was developed by employing an ultra-thin LiTaO3 (LT) layer as the sensitive element, integrated with nanoscale carbon material prepared by wafer-level graphics technology as the infrared absorption layer. Then, the sensor was hermetically sealed using inert gas through energy storage welding technology, exhibiting a high detectivity (D*) value of 4.19 × 108 cm·√Hz/W. Subsequently, a NO2 gas sensor was engineered based on the NDIR principle employing a Micro Electro Mechanical System (MEMS) infrared (IR) emitter, featuring a light path chamber length of 1.5 m, along with integrated signal processing and software calibration algorithms. This gas sensor was capable of detecting NO2 concentrations within the range of 0–500 ppm. Initial tests indicated that the gas sensor exhibited a full-scale relative error of less than 0.46%, a limit of 2.8 ppm, a linearity of −1.09%, a repeatability of 0.47% at a concentration of 500 ppm, and a stability of 2% at a concentration of 500 ppm. The developed gas sensor demonstrated significant potential for application in areas such as industrial monitoring and analytical instrumentation.

engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation

What problem does this paper attempt to address?

The problem this paper attempts to address is the development of a high-precision NO₂ gas sensor to tackle air quality issues caused by the combustion of fossil fuels, particularly nitrogen oxides emitted from ships and diesel engines. Nitrogen dioxide (NO₂) in nitrogen oxides has significant impacts on health and the environment, necessitating advanced monitoring systems to accurately measure NO₂ concentrations.

Specifically, the study proposes a gas detection system based on non-dispersive infrared (NDIR) technology. The main objectives of the research include:

1. **Developing a highly sensitive pyroelectric detector**: By using an ultra-thin LiTaO₃ layer as the sensitive element and combining it with nano-scale carbon materials as the infrared absorption layer, the detection performance of the detector is improved.
2. **Designing and manufacturing the NO₂ gas sensor**: Utilizing a micro-electro-mechanical system (MEMS) infrared emitter and a 1.5-meter-long optical path cavity, combined with signal processing and software calibration algorithms, to achieve high-precision detection of NO₂ concentration.
3. **Evaluating the sensor's performance**: Testing key parameters such as full-scale relative error, detection limit, linearity, repeatability, and stability of the sensor at different concentrations to verify its application potential in industrial monitoring and analytical instruments.

Through these objectives, the study aims to develop an NO₂ gas sensor with high selectivity, long lifespan, and high stability to meet the needs of various application scenarios.