Abstract:Amorphous alumina films are isotropic and have no grain boundaries, which make them have smooth surfaces, excellent properties, and wide applications in protective coatings, catalysis, and microelectronics. However, high-quality alumina films were usually prepared by vapor-phase approaches which need expensive equipment and long production time. Additionally, amorphous films are long-range disordered, which makes the study of structure–property relationships challenging. Here, a simple sol–gel method is employed to obtain high-quality amorphous Al2O3 thin films. The microstructure, morphology, and mechanical properties of amorphous Al2O3 thin films were systematically investigated. All the Al2O3 thin films heat-treated at 600–800∘C are in amorphous state with ultrasmooth surface (Ra values about 0.29–0.43 nm) and high mechanical properties (elastic modulus ∼170[Formula: see text]GPa, hardness ∼20[Formula: see text]GPa). The mechanical properties (E and H) of Al2O3 films gradually increase with the increase of heat-treating temperature. Additionally, the Al coordination of the amorphous alumina films are analyzed by solid-state NMR and correlated with the mechanical properties. The results show that in amorphous alumina, the presence of tetrahedral Al ([4]Al) and octahedral Al ([6]Al) is helpful to improve the mechanical properties, while the five-coordinated Al ([5]Al) is not conducive to improve the mechanical properties. The results demonstrate that sol–gel method is an attractive alternative to time-consuming and expensive vapor-phase approaches and are useful for scale-up to applications and research of amorphous alumina films.

Preparation of Alumina Ultrafine Powders Through Acrylamide, Starch and Glutaric Dialdehyde Mediated Sol–gel Method

Synthesis of Nano-Alumina Hydroxide Sol Using Sol-gel Method

Preparation of Alumina Aerogel via Supercritical Method

The Microstructure, Morphology, and Mechanical Properties of Sol-Gel-derived Amorphous Aluminum Oxide Films

PREPARATION AND CHARACTERIZATION OF ALUMINA NANOCRYSTALLINE POWDER BY COMPLEXING SOL-GEL METHOD

Synthesis of γ-alumina via precipitation in ethanol

Preparation of micron-sized alumina powders from aluminium beverage can by means of sol-gel process

Preparation of Al2O3 Porous Microspheres via an Emulsion Method Combined with a Sol-gel Method

Preparation of High Thermal-Stabile Alumina by Reverse Microemulsion Method

Synthesis of alumina aerogels from AlCl 3 ·6H 2 O with an aid of acetoacetic-grafted polyvinyl alcohol

Facile synthesis of nano-crystalline alpha-alumina at low temperature via an absolute ethanol sol-gel strategy

Preparation and Crystallization of Si-Al Gel

Synthesis of nano α-alumina powders using hydrothermal and precipitation routes: a comparative study

Preparation of porous alumina microspheres via an oil-in-water emulsion method accompanied by a sol–gel process

A Novel Sol–gel Synthetic Route to Alumina Nanofibers Via Aluminum Nitrate and Hexamethylenetetramine

Preparation Of Al2o3 Dense Films Using Sol Derived From Al(No3)(3)Center Dot 9h(2)O

Synthesis of Alumina Aerogels by Ambient Drying Method and Control of Their Structures

Preparation of Al2O3dense films using sol derived from Al(NO3)3·9H2O

A New Sol-Gel Route to Prepare Dense Al2O3 Thin Films

Fabrication of ultrafine mullite powders

Preparation of ultrafiltration γ-alumina membrane by a sol-gel process modified with polyvinyl alcohol