Suppression of subthreshold characteristics variation for junctionless multigate transistors using high-k spacers

Lou Haijun,Zhang Baili,Li Dan,Lin Xinnan,He Jin,Chan Mansun
DOI: https://doi.org/10.1088/0268-1242/30/1/015008
IF: 2.048
2015-01-01
Semiconductor Science and Technology
Abstract:In this work, the high-k spacer is proposed to suppress the subthreshold characteristics variation of junctionless multigate transistor (JMT) with non-ideal sidewall angle for the first time. It is demonstrated that the variation of subthreshold characteristics induced by the changing sidewall angle is efficiently suppressed by high-k spacers due to the enhanced corner effect through the fringe capacitance, and the electrostatic integrity of JMTs is also improved at sub-22 nm gate length. Two key parameters of high-k spacer, the thickness and length, have been optimized in terms of the suppression of subthreshold characteristics variation. Then their optimal values are proposed. The benefit of high-k spacer makes JMTs more scalable.
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