Effects of Fin Sidewall Angle on Subthreshold Characteristics of Junctionless Multigate Transistors

Lou Haijun,Li Dan,Dong Yan,Lin Xinnan,Yang Shengqi,He Jin,Chan Mansun
DOI: https://doi.org/10.7567/JJAP.52.104302
IF: 1.5
2013-01-01
Japanese Journal of Applied Physics
Abstract:In this work, the subthreshold characteristics of a junctionless multigate transistor (JMT) with a trapezoidal fin cross section are studied by three-dimensional simulations. The effects of sidewall angle (Theta) on subthreshold swing (SS) and drain-induced barrier lowering (DIBL) are evaluated and compared with the effects of doping concentration. The results show that SS and DIBL are strongly dependent on Theta and more seriously affected by Theta variation. Meanwhile, as compared with those observed in inversion-mode multigate MOSFETs (IM-MuGFETs), the variations in SS and DIBL in JMTs with sidewall angle are better suppressed. A design guideline is finally proposed to define the optimal parameters of JMTs for a given technology. (C) 2013 The Japan Society of Applied Physics
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