Selective Area Epitaxy of Semipolar InGaN/GaN Multiple Quantum Wells on GaN Microfacets Using Crossover Stripe Patterns

Zhenlong Wu,Peng Chen,Guofeng Yang,Zhou Xu,Feng Xu,Fulong Jiang,Rong Zhang,Youdou Zheng
DOI: https://doi.org/10.1016/j.spmi.2015.02.044
IF: 3.22
2015-01-01
Superlattices and Microstructures
Abstract:We report the growth of semipolar InGaN/GaN multiple quantum wells (MQWs) on GaN microfacet structures which are formed by selective area epitaxy on a template masked with SiO2 crossover stripe patterns. The well defined shapes are comprised of planar (0001) surface on top, smooth {11-22} and {1-101} microfacets on sidewalls. The different microfacets exhibit different emission properties which are attributed to variations in growth rate and indium incorporation on different microfacets under the same growth conditions. Furthermore, the emission peak of MQWs on {11-22) microfacets exhibits a redshift which is due to the lateral vapor diffusion and surface migration. (C) 2015 Elsevier Ltd. All rights reserved.
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