A thin film transistor, the thin film transistor and a method of driving the backplane preparation TFT drive backplane

王琅,彭俊彪,李民,徐华,徐苗,王磊,庞佳威,周雷,罗东向
2013-02-04
Abstract:A thin film transistor, the driving method for preparing a thin film transistor and a driving backplane backplane prepared, the preparation process comprises a thin film transistor on a substrate and depositing a metal conductive layer is patterned as a gate metal layer;.. B at the depositing a first metal layer on said gate insulating film as a gate insulating layer;. c deposited on the gate insulating layer and patterning the metal oxide film as an active layer;. d is deposited on the active layer a second insulating film, and exposure method using the self-aligned patterning the second insulating film as an etching stopper layer; E depositing a third insulating film as a protective layer on the etch stop layer, and the patterning. a third insulating film, and etched to form source and drain regions;. preparation of F on the protective layer and the metal thin film layer is patterned as the connection wire. The preparation process is simple, the thin film transistor prepared stability, small size, can achieve high definition TFT drive backplane, low-cost production.
Materials Science,Engineering
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