Preparation method of thin film transistor (TFT)

李东琦,魏洋,姜开利,范守善
2016-01-01
Abstract:A preparation method of a TFT comprises the following steps that a grid electrode is provided, and the surface of the grid electrode is provided with an insulating layer; a carbon nanotube film is provided, and laid in the surface of the insulating layer; the carbon nanotube film is arranged under a scanning electron microscope and shot to distinguish metal type carbon nanotubes from semiconductortype carbon nanotubes in the carbon nanotube film; the metal type carbon nanotubes are removed from the carbon nanotube film to form a semiconductor layer; and a source electrode and a drain electrode are formed separate from each other, and are electrically connected with the semiconductor layer to obtain the TFT.
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