Note: Measurement Speed Improvement of Microchip Nd:YAG Laser Feedback Interferometer.

Song Zhang,Yidong Tan,Shulian Zhang
DOI: https://doi.org/10.1063/1.4869872
2014-01-01
Abstract:We analyze the measurement speed limit of the quasi-common-path laser feedback interferometer and demonstrate a much improved measurement speed from 100 μm/s to 60 mm/s owing to the optimized system parameters and a novel signal processing method. The performance is experimentally verified by comparing to an Agilent 5529A dual-frequency laser interferometer.
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