Abstract:A simple and effective displacement sensor based on external anisotropic feedback in Nd:YAG lasers has been presented and demonstrated. When the system operates in anisotropic feedback induced by placing a birefringence element with phase difference about 45 degree(such as a wave plate) in the external cavity, both the laser intensities in two orthogonal directions are sinusoidal-modulated by the external reflector with a period of half wavelength displacement, but with a phase difference about 90 degree between them. When threshold intensity is introduced, a period of intensity fringe can be divided into four equal zones. Each zone corresponds to lambda/8 displacement of the external feedback reflector. According to the appearing sequence of the four states, the movement direction of external reflector can be discriminated. Thus, a novel displacement sensor with a resolution of up to 133 nm, as well as a function of direction discrimination, is believed to be achieved. The chief advantages of this sensor are that it is compact, small size, flexible, low cost, and robust. Most importantly, this sensor has a great potential to be improved in resolution by electric subdivision methods applied in the grating encoders. Experimental results have shown that the uncertainty (3 sigma) of displacement measurement is 0.2 mu m in a 7mm range, and the linearity is better than 2.57 x 10(-5).

A microchip laser feedback interferometer with nanometer resolution and increased measurement speed based on phase meter

Development of laser feedback interferometer based on Nd:YAG microchip lasers

Subnanometer Resolution Displacement Sensor Based on a Grating Interferometric Cavity with Intensity Compensation and Phase Modulation

Note: Measurement Speed Improvement of Microchip Nd:YAG Laser Feedback Interferometer.

Nanometer-scale Displacement Sensor Based on Phase-Sensitive Diffraction Grating.

Microchip Nd:YAG Dual-Frequency Laser Interferometer for Displacement Measurement.

High-speed Non-contact Displacement Sensor Based on Microchip Nd:YVO4 Laser Feedback Interferometry

Modified Homodyne Laser Interferometer Based on Phase Modulation for Simultaneously Measuring Displacement and Angle.

Nd∶YAG Microchip Laser Feedback Interferometer

Sinusoidal phase-modulating self-mixing interferometer with nanometer resolution and improved measurement velocity range

Laser Feedback Interferometric System for Both Displacement and Absolute Distance Measurement

High-resolution compact displacement sensor based on anisotropic feedback of microchip Nd: YAG lasers

Frequency-Shifted Optical Feedback Measurement Technologies Using a Solid-State Microchip Laser

Common-path Heterodyne Self-Mixing Interferometry with Polarization and Frequency Multiplexing

Characteristics of Intensity Modulation in Single-Mode Microchip Nd:YAG Lasers with Anisotropic Feedback and Its Applications

Full Path Compensation Laser Feedback Interferometry for Remote Sensing with Recovered Nanometer Resolutions.

Microchip Laser Feedback Interferometer with an Optical Path Multiplier

Research on the Key Technologies of Microchip Laser Common-Path Frequency-Modulation Feedback Interferometer

Real-Time Liquid Evaporation Rate Measurement Based on a Microchip Laser Feedback Interferometer

Compact Displacement Measurement System Based on Microchip Nd:Yag Laser with Birefringence External Cavity

Nanometer-Resolution Displacement Measurement System Based on Weak Feedback Effect of Dual-Frequency Laser