High-speed Non-contact Displacement Sensor Based on Microchip Nd:YVO4 Laser Feedback Interferometry

song zhang,yidong tan

DOI: https://doi.org/10.1364/sensors.2014.seth1d.4

IF: 3.9

2014-01-01

Sensors

Abstract:We analyze the measurement speed limit of the microchip laser feedback interferometer and demonstrate a much improved measurement speed from 100μm/s to 120mm/s owing to the optimized system parameters and a novel signal processing method.

What problem does this paper attempt to address?

A New Laser Displacement Sensor Based on Triangulation for Gauge Real-Time Measurement

Zhifeng Zhang,Qibo Feng,Zhan Gao,Cuifang Kuang,Cheng Fei,Zhang Li,Jinyun Ding

DOI: https://doi.org/10.1016/j.optlastec.2007.04.009

2008-01-01

Abstract:A new laser displacement sensor has been designed, constructed, and used in a train running at a speed of 64km/h. The laser displacement sensor is insensitive to ambient light and to temperature. The parameters of the laser displacement sensor are as follows: the measurement range is 20mm, and the laser displacement sensor resolution is 0.3mm. All the results show that this new displacement sensor meets the requirement for real-time gauge measurement.
Research on high-speed and non-contact angle detection based on laser measurement

Meng-fang YANG,Lei CHEN,Deng-wei ZHANG,Teng-chao HUANG,Yi-lan ZHOU,Xiao-wu SHU,Shuang-liang CHE,Cheng LIU

DOI: https://doi.org/10.3969/j.issn.1001-5078.2017.05.014

2017-01-01

Abstract:A high-speed and non-contact angle measuring method based on the principle of optical triangulation distance measurement was presented. Two laser displacement sensors were used to measure the angle when the angle of the target changed,which could calculate one dimensional motion angle of the target in real time. The experiment of angular measuring range and precision of the measurement system was carried out on the swing turntable,and fiber optic gyroscope was used to realize real-time synchronous measurement of the angle,and then the error was compensated by the least square fitting method. The experimental results show that the range of angle measurement can be up to ±10°,the precision can reach ±0.005°,and the measuring frequency can be up to 2000 Hz. This method adopts non-contact optical measurement method,and it has no damage to the measured surface.
Note: Measurement Speed Improvement of Microchip Nd:YAG Laser Feedback Interferometer.

Song Zhang,Yidong Tan,Shulian Zhang

DOI: https://doi.org/10.1063/1.4869872

2014-01-01

Abstract:We analyze the measurement speed limit of the quasi-common-path laser feedback interferometer and demonstrate a much improved measurement speed from 100 μm/s to 60 mm/s owing to the optimized system parameters and a novel signal processing method. The performance is experimentally verified by comparing to an Agilent 5529A dual-frequency laser interferometer.
A microchip laser feedback interferometer with nanometer resolution and increased measurement speed based on phase meter

Song Zhang,Yidong Tan,Zhou Ren,Yongqin Zhang,Shulian Zhang

DOI: https://doi.org/10.1007/s00340-013-5743-4

2013-01-01

Applied Physics B

Abstract:We introduce a new signal processing method based on phase meter into heterodyne microchip Nd:YAG laser feedback interferometer. The nanometer resolution and a higher measurement speed are realized. The factors determining the accuracy are analyzed. The displacements of the Physik Instrumente nanopositioning system and two piezoelectric transducers were measured. Experimental results indicate laser feedback interferometer’s ability of measuring nanoscale displacement and present promising application prospects in noncooperative targets measurement.
A High-Resolution Displacement Sensor Based on a Grating Interferometer with the Phase Modulation Technique

Shuangshuang Zhao,Changlun Hou,Juan Zhang,Jian Bai,Guoguang Yang

DOI: https://doi.org/10.1088/0957-0233/23/10/105102

IF: 2.398

2012-01-01

Measurement Science and Technology

Abstract:A high-resolution displacement sensor based on a grating interferometer with the phase modulation technique is demonstrated in this paper. The grating interferometer is formed with a grating and a mirror, which is fixed on a piezoelectric translator to generate phase modulation. The detected signal is intensity-modulated and processed with a lock-in amplifier for demodulation. Experimental results show that this displacement sensor has a displacement sensitivity of 19.8 mV nm(-1) and a high-resolution displacement detection of 0.05 nm in the linear region.
High-resolution compact displacement sensor based on anisotropic feedback of microchip Nd: YAG lasers

Yidong Tan,Shulian Zhang

DOI: https://doi.org/10.1117/12.810598

2009-01-01

Abstract:A simple and effective displacement sensor based on external anisotropic feedback in Nd:YAG lasers has been presented and demonstrated. When the system operates in anisotropic feedback induced by placing a birefringence element with phase difference about 45 degree(such as a wave plate) in the external cavity, both the laser intensities in two orthogonal directions are sinusoidal-modulated by the external reflector with a period of half wavelength displacement, but with a phase difference about 90 degree between them. When threshold intensity is introduced, a period of intensity fringe can be divided into four equal zones. Each zone corresponds to lambda/8 displacement of the external feedback reflector. According to the appearing sequence of the four states, the movement direction of external reflector can be discriminated. Thus, a novel displacement sensor with a resolution of up to 133 nm, as well as a function of direction discrimination, is believed to be achieved. The chief advantages of this sensor are that it is compact, small size, flexible, low cost, and robust. Most importantly, this sensor has a great potential to be improved in resolution by electric subdivision methods applied in the grating encoders. Experimental results have shown that the uncertainty (3 sigma) of displacement measurement is 0.2 mu m in a 7mm range, and the linearity is better than 2.57 x 10(-5).
Nanometer-scale Displacement Sensor Based on Phase-Sensitive Diffraction Grating.

Shuangshuang Zhao,Changlun Hou,Jian Bai,Guoguang Yang,Feng Tian

DOI: https://doi.org/10.1364/ao.50.001413

IF: 1.9

2011-01-01

Applied Optics

Abstract:In this paper, a nanometer-scale displacement sensor based on a phase-sensitive diffraction grating with interferometeric detection is described and experimentally demonstrated. The proposed displacement sensor consists of a coherent light source, a microstepping motor controller, an integrated grating, a mirror, and a differential circuit. Experimental results show that the displacement sensor has a sensitivity of about 6 mV/nm and a resolution of less than 1 nm. This displacement measurement is an attractive technology with high sensitivity, broad dynamic range, good reliability, and immunity to electromagnetic interference.
Subnanometer Resolution Displacement Sensor Based on a Grating Interferometric Cavity with Intensity Compensation and Phase Modulation

Qianbo Lu,Chen Wang,Jian Bai,Kaiwei Wang,Wenxiu Lian,Shuqi Lou,Xufen Jiao,Guoguang Yang

DOI: https://doi.org/10.1364/ao.54.004188

IF: 1.9

2015-01-01

Applied Optics

Abstract:A subnanometer resolution displacement sensor based on a grating interferometric cavity with intensity compensation and phase modulation is proposed and experimentally demonstrated in this paper. The grating interferometric cavity is composed of a frequency-stabilized laser source, a diffraction grating, and a mirror. To realize a subnanometer resolution, the intensity compensation and phase modulation technique are introduced, which are achieved by an intensity compensation light path, three closed placed photodetectors, a processing circuit and a piezoelectric ceramic transducer, and a lock-in amplifier. The intensity compensation technique can improve the stability of the output intensity signal greatly while the phase modulation technique can increase the signal-to-noise ratio dramatically. The detected signal is intensity modulated and processed by a particular arithmetic circuit. Experimental results indicate that the sensitivity of this displacement sensor is 44.75 mV/nm and the highest resolution can reach 0.017 nm, which is 27 times better than the one without intensity compensation and phase modulation. As a high-performance sensor with immunity to electromagnetic interference, this displacement sensor has potential to be used in nanoscience and technology.
Development of laser feedback interferometer based on Nd:YAG microchip lasers

Song Zhang,Shulian Zhang,Zhou Ren

DOI: https://doi.org/10.3969/j.issn.1007-2276.2011.10.017

2011-01-01

Abstract:Microchip laser has exhibited ultrahigh sensitivity to optical feedback, which plays an important role in the laser feedback measurement technology. The quasi-common-path microchip laser feedback interferometer can effectively suppress the error caused by the non-compensated external cavity length by frequency shifting and multiplexing while it can keep the advantage of microchip laser's high sensitivity and the high resolution. It can measure the non-cooperative targets without contact, which can fill the blank in precision displacement measurement with laser interferometer. Compared with Agilent5529A dual-frequency interferometer, the indexes of the laser feedback interferometer are obtained. The linearity is better than 3 × 10 -5, measuring range is 50 mm and standard-deviation is about 200 nm.
An ultracompact high-resolution displacement sensor based on self-interference effect of single optical nanograting

Jie Qi,Chenguang Xin

DOI: https://doi.org/10.1117/12.2600368

2021-01-01

Abstract:Benefitting from properties including high sensitivity, high resolution, immunity to electromagnetic interference and remote sensing ability, optical-grating-based displacement measuring technologies have been widely used in many fields such as semiconductor manufacturing, precision machining, microscopic techniques and photolithography recently. In this work, high-resolution displacement measuring is demonstrated with an ultracompact structure consist of only a few optical components by using self-interference effect of a single nanograting. The resolution is demonstrated to be as low as 0.1-nm level. This method shows great potential in developing miniaturized high-resolution displacement devices and systems, which are highly demanded for future integrated high-precision machinery manufacturing systems.
High-precision Microdisplacement Sensor Based on Zeroth-Order Diffraction Using a Single-Layer Optical Grating.

Hongbo Zhao,Mengwei Li,Rui Zhang,Zhibin Wang,Kunyang Xie,Chenguang Xin,Li Jin,Zhouxin Liang

DOI: https://doi.org/10.1364/ao.59.000016

IF: 1.9

2019-01-01

Applied Optics

Abstract:A high-precision microdisplacement sensor based on zeroth-order diffraction of a single-layer optical grating is reported. Laser grating interference occurs when part of the laser is reflected diffraction by the grating and another part is vertically reflected back by a mirror and diffracted again by the grating, thus generating optical interferometric detection. For the purpose of obtaining the optimal contrast of the optical interferometric detection, the duty cycle of the grating and the orders of diffraction were optimized by the diffraction scalar theory. The microdisplacement sensor demonstrates a sensitivity of 0.40%/nm, a resolution of 0.6 nm, and a full-scale range of up to 100 µm. This work enables a high-performance displacement sensor, and provides a theoretical and technical basis for the design of a displacement sensor with an ultracompact structure.
Microchip Nd:YAG Dual-Frequency Laser Interferometer for Displacement Measurement.

Hao Chen,Shulian Zhang

DOI: https://doi.org/10.1364/oe.417462

IF: 3.8

2021-01-01

Optics Express

Abstract:The dual-frequency laser interferometer is an indispensable instrument to measure length, position, deformation and other parameters with high precision and long measurement distance in the advanced manufacturing industry and scientific research. In general, the light source of interferometer is the dual-frequency He-Ne laser. The disadvantages of He-Ne laser include generally large size, more heat radiation to the environment, and limited service life, which limits its application. In this paper, we study a microchip Nd:YAG dual-frequency laser interferometer with a 17.4 MHz frequency difference, which is formed by the stress-induced birefringence in the microchip itself. The down-conversion mixer is designed to decrease the beat frequency to about 5 MHz in heterodyne signal preprocessing modular to meet the bandwidth of phase meter. The experimental results show that the microchip Nd:YAG dual-frequency laser interferometer has a displacement resolution of 10 nm and a measuring range of 500 mm. Due to the advantages of the microchip dual-frequency laser, such as small size (40×40×35 mm), good portability, less power consumption and almost infinite service life, the microchip Nd:YAG dual-frequency laser interferometer has broad application prospects.
Compact Displacement Measurement System Based on Microchip Nd:Yag Laser with Birefringence External Cavity

Y. Tan,S. Zhang

DOI: https://doi.org/10.4028/www.scientific.net/kem.381-382.39

2008-01-01

Key Engineering Materials

Abstract:We demonstrate a method of displacement measurement based on Nd:YAG laser with birefringence external cavity. The measurement system is composed of Nd:YAG laser, a wave plate with phase retardation of 450 and an external feedback mirror. Due to the birefringence effect, the external cavity modulates the laser output intensities in the two orthogonal directions with a phase difference of 900, which is two times to that of the wave plate. Both the in-quadrature laser intensities vary one period, when the external cavity length changes λ/2. These two channel laser intensities with phase difference of 900 can be subdivided to λ/8 after 4-fold evaluation. The movement direction of external mirror can be distinguished by the lead or lag between these two channel signals. Our method can improve the resolution of displacement measurement 4 times that of conventional optical feedback, and reach 133nm for a laser wavelength of 1.064µm.
Frequency-Shifted Optical Feedback Measurement Technologies Using a Solid-State Microchip Laser

Kaiyi Zhu,Hongfang Chen,Shulian Zhang,Zhaoyao Shi,Yun Wang,Yidong Tan

DOI: https://doi.org/10.3390/app9010109

2018-01-01

Applied Sciences

Abstract:Since its first application toward displacement measurements in the early-1960s, laser feedback interferometry has become a fast-developing precision measurement modality with many kinds of lasers. By employing the frequency-shifted optical feedback, microchip laser feedback interferometry has been widely researched due to its advantages of high sensitivity, simple structure, and easy alignment. More recently, the laser confocal feedback tomography has been proposed, which combines the high sensitivity of laser frequency-shifted feedback effect and the axial positioning ability of confocal microscopy. In this paper, the principles of a laser frequency-shifted optical feedback interferometer and laser confocal feedback tomography are briefly introduced. Then we describe their applications in various kinds of metrology regarding displacement measurement, vibration measurement, physical quantities measurement, imaging, profilometry, microstructure measurement, and so on. Finally, the existing challenges and promising future directions are discussed.
Study on Displacement Measurement with Optical Feedback of Dual Frequency Laser

Mao Wei,Zhang Shu-Lan,Zhang Lian-Qing,Zhu Jun,Li Yan

DOI: https://doi.org/10.7498/aps.55.4704

IF: 0.906

2006-01-01

Acta Physica Sinica

Abstract:A novel displacement measurement with optical feedback of dual frequency laser has been put forward, which has been investigated both theoretically and experimentally. Intensities of the laser and the two orthogonally polarized modes are detected. It is found that the laser output power will be modulated when the object moves. When the displacement of the object is half wavelength, the signal of optical feedback has two peaks with the same depth of modulation. So the resolution of displacement sensor can be doubled. It is also found that when the object changes its moving direction, the order of intensity variation of the two modes will be changed. It can be used to judge the direction of the displacement. The simulation results are in good agreement with the experimental results. It is indicated that the sensor has advantages of simplicity, high resolution, direction identification cepability, large measurement range, operation in high optical feedback regime, and so on.
Laser Feedback Interferometric System for Both Displacement and Absolute Distance Measurement

LI Duo,WAN Xin-jun,ZHANG Shu-lian

DOI: https://doi.org/10.3969/j.issn.1002-2082.2007.04.025

2007-01-01

Abstract:A laser feedback interferometric system for measuring both the displacement and absolute distance of non-cooperative objects is presented.The system is based on a laser-diode pumped Nd:YAG microchip laser,and it is comprised of a frequency-shifted laser feedback interferometer,a frequency-modulated microchip laser based on pumping modulation and a phase-sensitive detection device.The principle of frequency-shifted laser feedback interference is introduced.The principle and method of displacement and absolute distance measurements are elaborated.The measurement resolution was analyzed.The displacement and absolute distance of a blacken workpiece surface were detected experimentally in the laboratory.The results prove that the interferometric system has high sensitivity and relaxed requirement for the reflectivity of the UUT surface,and meets the need of both displacement and absolute distance measurements for uncoupled objects.
Common-path Heterodyne Self-Mixing Interferometry with Polarization and Frequency Multiplexing

Shaohui Zhang,Shulian Zhang,Yidong Tan,Liqun Sun

DOI: https://doi.org/10.1364/ol.41.004827

IF: 3.6

2016-01-01

Optics Letters

Abstract:A heterodyne Nd:YVO4 microchip laser self-mixing interferometry based on frequency and polarization multiplexing has been demonstrated. By using two orthogonally polarized lights to measure the measurement and reference target, the effect of the acousto-optic crystal thermal creep and air disturbance in interference light path is eliminated. In addition, the measurement error caused by the difference between two identical microchip lasers is compensated for by shifted frequency multiplexing technique. A rate equations model with multi-channel frequency-shifted feedback is established for interpreting the principle of the interferometry. Due to the ultrahigh sensitivity of the microchip laser, the target used in the experiment is a non-cooperative object which is different from the targets in conventional Michelson interferometers. Under typical room conditions, the short-term resolution is better than 2.5 nm, and the long-term zero drift is less than 60 nm within 7 h. The result shows that this self-mixing interferometry system is feasible and robust in the field of displacement measurement.
High Resolution Displacement Measurement by a Novel Michelson Laser

Xiaomin Qin,Zijie Liu,Zhiyang Wang,Hangbo Shi,Tiantian Shi,Jingbiao Chen

DOI: https://doi.org/10.1109/eftf61992.2024.10722644

2024-01-01

Abstract:High-resolution displacement measurement is crucial in precision machining, biomedical sensing, and other fields. In this paper, we propose a novel displacement measurement scheme based on Michelson lasers, which obtains the cavity length variations from the laser frequency change, tracing displacement measurement to laser frequency measurement with high resolution. Furthermore, we present a Faraday-Michelson laser configuration utilizing the narrowband Faraday anomalous dispersion atomic filter as the frequency selection device, enabling simultaneous oscillation output of two laser beams. With frequency measurement achieving resolutions up to 12 digits, our scheme can theoretically reach a displacement measurement resolution in pm or even finer. It exceeds the current resolution of displacement measurement by laser interferometers, and can be used for precision displacement measurement and control of lithography machine and so on, paving the way for future advancements in high-resolution displacement measurement.
Nanometer-Resolution Displacement Measurement System Based on Weak Feedback Effect of Dual-Frequency Laser

Li Zhang,Shulian Zhang,Zhou Lufei,Yusaku Fujii

DOI: https://doi.org/10.1016/j.phpro.2009.06.004

2009-01-01

Abstract:A high-resolution displacement measurement system based on weak feedback effect of birefringence dual frequency lasers has been presented and demonstrated.The experimental setup of an optical feedback dual-frequency laser is developed by using the phase delay between the optical feedback fringes of the two orthogonally polarized lights to realize displacement division and direction discrimination.A concise theory is given to explain this experimental result.The sub-circuit is mainly composed of the 5-division ASIC,and the FPGA which is used to realize the signal 4-division.A novel displacement apparatus with a resolution of being as high as 15.8 nm,as well as the function of direction discrimination,can meet the demand of high-precision measurement.
Study on the micro-displacement measurement by laser interference and image processing methods

Lei Zheng,Jiadao Wang,Xianmei Kong,Darong Chen,Zhongyou Liu,Jin Qian,Yongjian Li

DOI: https://doi.org/10.1117/12.521907

2003-01-01

Abstract:This paper presents a measurement system that can measure micro displacement by laser interference and image process methods. The displacement is measured by testing the relative moving distance between the movable mirror and the fixed mirror. Based on Michelson interference theory, the interference stripe images produced by a monochromatic laser source is collected by the CCD, which is used in the system to track the motion of PZT. The curve of light distribution is analyzed and dealt by Fourier Transformation and Low-pass Filtering methods. Least Squares Fit method is used to get normal amplitude, angle frequency and phase of the curve of light distribution and account the change of phases. Appling this measuring system, the micro-displacement is measured and obtains good test results.

High-speed Non-contact Displacement Sensor Based on Microchip Nd:YVO4 Laser Feedback Interferometry

A New Laser Displacement Sensor Based on Triangulation for Gauge Real-Time Measurement

Research on high-speed and non-contact angle detection based on laser measurement

Note: Measurement Speed Improvement of Microchip Nd:YAG Laser Feedback Interferometer.

A microchip laser feedback interferometer with nanometer resolution and increased measurement speed based on phase meter

A High-Resolution Displacement Sensor Based on a Grating Interferometer with the Phase Modulation Technique

High-resolution compact displacement sensor based on anisotropic feedback of microchip Nd: YAG lasers

Nanometer-scale Displacement Sensor Based on Phase-Sensitive Diffraction Grating.

Subnanometer Resolution Displacement Sensor Based on a Grating Interferometric Cavity with Intensity Compensation and Phase Modulation

Development of laser feedback interferometer based on Nd:YAG microchip lasers

An ultracompact high-resolution displacement sensor based on self-interference effect of single optical nanograting

High-precision Microdisplacement Sensor Based on Zeroth-Order Diffraction Using a Single-Layer Optical Grating.

Microchip Nd:YAG Dual-Frequency Laser Interferometer for Displacement Measurement.

Compact Displacement Measurement System Based on Microchip Nd:Yag Laser with Birefringence External Cavity

Frequency-Shifted Optical Feedback Measurement Technologies Using a Solid-State Microchip Laser

Study on Displacement Measurement with Optical Feedback of Dual Frequency Laser

Laser Feedback Interferometric System for Both Displacement and Absolute Distance Measurement

Common-path Heterodyne Self-Mixing Interferometry with Polarization and Frequency Multiplexing

High Resolution Displacement Measurement by a Novel Michelson Laser

Nanometer-Resolution Displacement Measurement System Based on Weak Feedback Effect of Dual-Frequency Laser

Study on the micro-displacement measurement by laser interference and image processing methods