Nanometer-Resolution Displacement Measurement System Based on Weak Feedback Effect of Dual-Frequency Laser

Li Zhang,Shulian Zhang,Zhou Lufei,Yusaku Fujii
DOI: https://doi.org/10.1016/j.phpro.2009.06.004
2009-01-01
Abstract:A high-resolution displacement measurement system based on weak feedback effect of birefringence dual frequency lasers has been presented and demonstrated.The experimental setup of an optical feedback dual-frequency laser is developed by using the phase delay between the optical feedback fringes of the two orthogonally polarized lights to realize displacement division and direction discrimination.A concise theory is given to explain this experimental result.The sub-circuit is mainly composed of the 5-division ASIC,and the FPGA which is used to realize the signal 4-division.A novel displacement apparatus with a resolution of being as high as 15.8 nm,as well as the function of direction discrimination,can meet the demand of high-precision measurement.
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