Consideration of Conductive Filament for Realization of Low-Current and Highly-Reliable TaOx ReRAM

R. Yasuhara,T. Ninomiya,S. Muraoka,Z. Wei,K. Katayama,T. Takagi
DOI: https://doi.org/10.1109/imw.2013.6582091
2013-01-01
Abstract:Characteristics and their origin of a conductive filament in TaO x ReRAM are investigated. The results of systematic experimentation demonstrate that the formation of a small conductive filament with high density of oxygen vacancies, achieved by controlling the oxygen content of the resistance-switching material and forming/set current, is the key to achieving low-current switching combined with long retention.
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