In-Situ TEM Observation of Resistive Switching Behaviors by in Nonvolatile Memory

Jui-Yuan Chen,Chun-Wei Huang,Cheng-Lun Hsin,Yu-Ting Huang,Wen-Wei Wu
DOI: https://doi.org/10.1149/ma2012-01/22/930
2012-01-01
ECS Meeting Abstracts
Abstract:Resistive random access memory (ReRAM) is considered the most potential non-volatile memory for nextgeneration. In recent years, the switch behavior has widely reported, since to comprehend the switch mechanism can help to improve the stability and reduce scalability through fabrication of the devices. However, the non-real-time observation could only see the initial and final state, it may miss some information during electrical measurement process. In this work, we prepared the particular sample for transmission electron microscopy (TEM) observation to directly observe the formation of conducting filaments in the Pt/ ZnO/ Pt structure in real time. The conducting path forms when the current rise to the compliance limit. Furthermore, the corresponding current-voltage measurements could help us to understand the switching mechanism of ZnO film. In addition, high resolution transmission electron microscopy (HRTEM) has been used to identify the structure of filament, which enables us to clarify the conducting paths are Zinc. We demonstrated that the behavior of resistive switching is due to the migration of oxygen, it will lead to conversion between Zn and ZnO.
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