Abstract:The thermal transport properties of thin films have garnered significant research interest due to their diverse applications in new energy sources and thermal management. As the thickness of anisotropic thin films decreases to a few microns, conventional laser flash analyzer and infrared lock-in thermography encounter difficulties in characterizing their thermophysical properties. In response to this challenge, we propose a laser spot periodic heating technique based on sub-region phase fitting for measuring anisotropic thin films. In this method, a thermocouple monitors the temperature response on the sample back surface, and the amplified voltage is subsequently measured using a lock-in amplifier to record the spatial distribution of the phase signal. Finite element simulations indicate that the impact of contact thermal resistance between the thermocouple and the sample can be negligible when measuring in variable locations. The anisotropic thermal diffusivity is then fitted using one-dimensional and three-dimensional unsteady-state heat conduction models, with the spatial distribution of phase lag being partitioned into linear and non-linear regions, respectively. We measure the in-plane and out-of-plane thermal diffusivity of a stainless-steel film, demonstrating the reliability and accuracy of the method. As a showcase study demonstrating the capabilities of our methodology, we test four anisotropic thin films, covering a large spectrum of thermal diffusivity, ranging from 5.5 × 10 −8 m 2 /s to 9.6 × 10 −4 m 2 /s. It is verified that the present method can accomplish anisotropic thermal diffusivity measurements for thin films with thicknesses ranging from a few to hundreds of microns, a capability crucial for advancing the characterization of the thermophysical properties of materials.

Thermal Characterization of $\hbox{si}_{3}\hbox{n}_{4}$ Thin Films Using Transient Thermoreflectance Technique

Raman Scattering Characterization of Transparent Thin Film for Thermal Conductivity Measurement

Measurement of the Thermal Transport Properties of Dielectric Thin Films Using the Micro-Raman Method

Thermal characterization of thin films: A chip-based approach for in-plane property analysis

Thermal conductivity measurement of submicrometer-scale silicon dioxide films by an extended micro-Raman method

Thermal Conductivity Measurements of Ultra-Thin Single Crystal Silicon Films Using Improved Structure

Deposition and Thermoelectric Properties of N-Doped SiC Thick Films

Research On Thermal Conductivity Measurement Of Submicrometer-Scale Silicon Dioxide Film In Thermal Flow Sensor By Micro-Raman Technique

Novel Electrical Characterization of Thin 3C-Sic Films on Si Substrates

Determination of Thermal Conductivity of phase pure 10H-SiC Thin Films by non-destructive Raman Thermometry

Thermal conductivity measurements of thin films by non-contact scanning thermal microscopy under ambient conditions

The Intrinsic Thermoreflectance Property of 4H-SiC

Characterisation of High Thermal Conductivity Thin-Film Substrate Systems and Their Interface Thermal Resistance

Optical and surface properties of 3C–SiC thin epitaxial films grown at different temperatures on 4H–SiC substrates

Measurement of In-Plane Thermal Conductivity of Ultrathin Films Using Micro-Raman Spectroscopy

Specific heat measurement of thin suspended SiN membrane from 8 K to 300 K using the 3$ω$-V$\ddot{o}$lklein method

Measurement of in-plane thermal conductivity of self-suspended thin films

Anisotropic Thermal Conductivity of 4H and 6H Silicon Carbide Measured Using Time-Domain Thermoreflectance

Anisotropic thermal diffusivity measurement of thin films: From a few to hundreds of microns

Film Thickness Dependence of the Nisi-To-Nisi2 Transition Temperature in the Ni/Pt/Si(100) System

Analysis of Simplified Heat Transfer Models for Thermal Property Determination of Nano-Film by TDTR Method