Performance Breakthrough in 8 Nm Gate Length Gate-All-Around Nanowire Transistors Using Metallic Nanowire Contacts

Y. Jiang,T. Y. Liow,N. Singh,L. H. Tan,G. Q. Lo,D. S. H. Chan,D. L. Kwong
DOI: https://doi.org/10.1109/vlsit.2008.4588553
2008-01-01
Abstract:Parasitic S/D resistances in extremely scaled GAA nanowire devices can pathologically limit the device drive current performance. We demonstrate for the first time, that S/D extension dopant profile engineering together with successful integration of low resistivity metallic nanowire contacts greatly reduces parasitic resistances. This allows 8 nm gate length GAA nanowire devices in this work to attain record-high drive currents of 3740 muA/mum.
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