Abstract:Novel torsion-mirror actuators with monolithically integrated new fiber holding structures, which can feature self-fixing and self-aligning of optical fibers, are fabricated in regular silicon wafers as well as in SOI wafers by using the mixed micromachining based on the surface and bulk silicon microelectronics. The electromechanical performances of the actuators and the optical properties of their micro-mirrors are investigated experimentally and theoretically. The electrostatic yielding voltages for driving the micro-mirrors of the actuators to tilt from 0° to 90° spontaneously are in the range of 270–290V and the minimum holding voltages for keeping the tilting angle of the mirrors to be in 90° are found 55V or so when the thickness of the torsion-beams suspending the mirrors is about 1μm. Theoretical analysis manifests that the yielding voltage is most sensitive to the beam thickness among the series of design parameters about the torsion-mirror actuator structures. The micro-mirrors of the actuators can cyclically vibrate 108 times at least between 0° and 90°, and their shortest actuating time can reach an estimated less than 2ms. The surface roughness and its distribution of the micro-mirrors of the actuators are small and smooth, respectively, which is acceptable for wavelength division multiplexing applications basically.

The Sacrificial Layer Releasing of Micro-Machined Optical-Fiber Switch with Poly-Si Torsion Mirror

The Fabrication of 16*16 MEMS-Based Optical Switch with Accurate Optical Fiber Grooves Integration

Fabrication and electromechanical characteristics of 2×2 torsion-mirror optical switch arrays with monolithically integrated fiber self-holding structures

Novel MEMS Torsional Mirror Optical Switch

A New Release Process for Polysilicon Surface Micromachining Using Sacrificial Polysilicon Anchor and Photolithography after Sacrificial Etching

A new process for releasing micromechanical structures in surface micromachining with polysilicon support and LPCVD Si3N4 embedded mask

An Improved Electrostatically-Driven Micro Torsion Mirror Fabricated by Silicon Micromachining for Optical Switching Devices

Electromechanical and Optical Properties of Torsion-Mirror Actuators for Optical Switching Applications

Study on optical parts of MOEMS optical switch with low insertion loss

Low-voltage Micromachining-Based Scalable Optical Switch

Novel Optical Torsion-Mirror Components For Fiber Sensing Or Networking Applications

16×16 Mirror type optical switch with integrated fiber alignment and steady switching state

Novel structure of micromachined optical switch with self-aligned holding structures of optical fibers

Electromechanical Studies On Micro Torsion-Mirror Actuators With Monolithically Integrated Fiber Self-Holding Structures

A New Release Process in Surface Micromachining-Double Mask Technology

Micromachined Optical Switch with a Vertical SU-8 Mirror

Fabrication and characterization of torsion-mirror actuators for optical networking applications

Electro-Optic Polymer Assisted Optical Switch Based on Silicon Slot Structure

Fabrication of a sidewall reflective optical switch by using FIB etching

Optical Properties of Direct Wafer Bonded Micro-Cavity Structures

Symmetrical Design And Analysis Of A Novel Mems-Based 1x2 Optical Switch