Optical Properties of Direct Wafer Bonded Micro-Cavity Structures

Yanfeng Lao,Huizhen Wu,Zhanchao Huang,Cheng Liu,Meng Cao
DOI: https://doi.org/10.3969/j.issn.1674-4926.2006.z1.075
2006-01-01
Abstract:Fabry-Perot micro-cavity resonator structures are directly wafer bonded. Their optical properties of reflectivity are measured using Fourier-transform infrared spectroscopy and simulated theoretically using transfer matrix method. An exponential variation of optical thickness for multi-layers at the both sides of the bonding interface is constructed to analyze the effects of wafer-bonding on the micro-cavity structures. Results show that lower-temperature bonding is advantageous for the fabrication of high-optical quality structures. But a defect-blocking layer should be involved into the wafer-boned structures for the improvement of bonding quality when a higher annealing temperature is used.
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