Abstract:The fabrication of nanostructures beyond the diffraction limit has been the focus of nanotechnology research. Scanning probe microscopy (SPM) has attracted the attention of researchers for the detection and manufacture of nanostructures. Here, a nanosecond laser irradiated a cantilevered scanning near-field optical microscopy (SNOM) tip and directly wrote subwavelength nanostructures on Au nanofilm, without the assistance of a mask or vacuum atmosphere. This method was stable and reproducible for long-term use. The in situ morphology detection was conducted after the writing process by atomic force microscope (AFM). A feature linewidth of approximately 83.6 nm (<λ/6) was confirmed using scanning electron microscopy (SEM). Linewidth of 167.8 ± 6.6 nm was reproduced stably. Theoretical calculations revealed that the elliptical heat distribution under the SNOM tip generated different linewidths when the tip scanned vertically and horizontally. It also interpreted the influential mechanism of single-pulse energy. The simulated linewidths were consistent with the fabricated linewidths. According to the elemental analysis by energy dispersive spectrometer (EDS), the mechanism of this method can be interpreted as melting of the Au nanofilm instead of oxidation. Owing to its high positioning, machining accuracy, and instantaneous energy, this technology is considered convenient and economical for nanostructure fabrication and is proposed to be applied in nanolithography on multiple materials in the future.

Nanofabrications Using A Laser Collimated And Focused Neutral Chromium Atom Beam

Laser-Diode-Tuned Sequential Laser Atom Cooling and Trapping for Nanofabrications

Microfabrication Assisted by Laser-Trapped Microparticle Tools

Nano-fabrication System Based on Atomic Force Microscopy

Controllable Fabrication of Super-Resolution Nanocrater Arrays by Laser Direct Writing.

Controllable fabrication of Sub-20nm structures with coupling field tip enhancement effect induced by nanosecond pulsed laser irradiation

AFM Based Femto-Second Laser Nanofabrication of PMMA

Fabrication of Nanostructures by Laser Optical Focusing

Nanofabrication mechanism of λ/20 features achieved by coupling field tip enhancement induced with nanosecond laser irradiating AFM probe tip

ANALYSIS OF ATOM FOCUSING IN A STANDING WAVE LASER FIELD FOR NANOMETER-SCALE FABRICATION

Nanostructure Generation Based on Laser Cooling and Mechanical Mask

Laser nano-fabrication inside silicon with spatial beam modulation and non-local seeding

Direct Writing Nanostructures on Au Nano-Film by Laser Irradiating Cantilevered Scanning Near-Field Optical Microscope Tip

Fabrication of Metal Nanoscale Devices on Insulating Membranes by High-Resolution Atom Ablation

Fabrication of nanostructure on Au nano-film by nanosecond laser coupled with cantilevered scanning near-field optical microscopy probe

Surface Nano-fabrication by Laser Precision Engineering

Nanofabrication with the thermal AFM metallic tip irradiated by continuous laser

Fabrication of highly homogeneous and controllable nanogratings on silicon via chemical etching-assisted femtosecond laser modification

Experimental Research on Nanostructure Fabricated by AFM Probe Combining with a CW Laser

Laser nanofabrication inside silicon with spatial beam modulation and anisotropic seeding

Laser Nanofabrication: Applications in Micro-Optics, Micro-Electronics, Micromachines, and Microfluidics