Abstract:The prospect of employing nanophotonic methods for controlling photon–electron interactions has ignited substantial interest within the particle accelerator community. Silicon-based integrated dielectric laser acceleration (DLA) has emerged as a viable option by leveraging localized photonic effects to emit, accelerate, and measure electron bunches using exclusively light. Here, using highly regular nanopatterning over large areas while preserving the crystalline structure of silicon is imperative to enhance the efficiency and yield of photon-electron effects. While several established fabrication techniques may be used to produce the required silicon nanostructures, alternative techniques are beneficial to enhance scalability, simplicity and cost-efficiency. In this study, we demonstrate the nano-synthesis of silicon structures over arbitrarily large areas utilizing exclusively deep ultraviolet (DUV) ultrafast laser excitation. This approach delivers highly concentrated electromagnetic energy to the material, thus producing nanostructures with features well beyond the diffraction limit. At the core of our demonstration is the production of silicon laser-induced surface structures with an exceptionally high aspect-ratio -reaching a height of more than 100 nm- for a nanostructure periodicity of 250 nm. This result is attained by exploiting a positive feedback effect on the locally enhanced laser electric field as the surface morphology dynamically emerges, in combination with the material properties at DUV wavelengths. We also observe strong nanopattern hybridization yielding intricate 2D structural features as the onset of amorphization takes place at high laser pulse fluence. This technique offers a simple, yet efficient and attractive approach to produce highly uniform and high aspect ratio silicon nanostructures in the 200–300 nm range.

Laser nano-fabrication inside silicon with spatial beam modulation and non-local seeding

Laser nanofabrication inside silicon with spatial beam modulation and anisotropic seeding

High Throughput Laser Nano Direct Writing Technique

In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon

Microfabrication Assisted by Laser-Trapped Microparticle Tools

Beyond 100 nm Resolution in 3D Laser Lithography: Post Processing Solutions

Beyond the "coffee ring": re-entrant ordering in an evaporation-driven self-assembly in a colloidal suspension on a substrate.

Laser Nanofabrication: Applications in Micro-Optics, Micro-Electronics, Micromachines, and Microfluidics

Highly uniform silicon nanopatterning with deep-ultraviolet femtosecond pulses

Simultaneous synthesis and integration of nanoscale silicon by three-photon laser direct writing

Surface Nano-fabrication by Laser Precision Engineering

Fabrication of highly homogeneous and controllable nanogratings on silicon via chemical etching-assisted femtosecond laser modification

Laser Lithography of Monolithically‐Integrated Multi‐Level Microchannels in Silicon

Creation of a Micro-Nanoworld with Photons

3‐D Nanofabrication of Silicon and Nanostructure Fine‐Tuning via Helium Ion Implantation

Study for Laser Controlled Fabrication of Micro/Nano-Structures of Silicon Based on Multi-Physics Model

Ultrafast Laser 3D Nanolithography of Fiber-Integrated Silica Microdevices

Super-regular femtosecond laser nanolithography based on dual-interface plasmons coupling

Fabricating 3D Si nanostructure via a novel Ga+ implantation enabled maskless dry etching process

Parallel Laser Micro/Nano‐Processing for Functional Device Fabrication

{\it In-situ} Laser Microprocessing at the Quantum Level