Abstract:So far, nanostructuring of hard optical crystals has been exclusively limited to their surface, as stress-induced crack formation and propagation render high-precision volume processes ineffective<a data-track="click" data-track-action="reference anchor" data-track-label="link" data-test="citation-ref" aria-label="Reference 1" title="Gamaly, E. G. et al. Laser–matter interaction in the bulk of a transparent solid: confined microexplosion and void formation. Phys. Rev. B 73, 214101 (2006)." href="/articles/s41566-018-0327-9#ref-CR1" id="ref-link-section-d351e438">1</a>,<a data-track="click" data-track-action="reference anchor" data-track-label="link" data-test="citation-ref" aria-label="Reference 2" title="Juodkazis, S., Mizeikis, V. & Misawa, H. Three-dimensional microfabrication of materials by femtosecond lasers for photonics applications. J. Appl. Phys. 106, 051101 (2009)." href="/articles/s41566-018-0327-9#ref-CR2" id="ref-link-section-d351e441">2</a>. Here, we show that the rate of nanopore chemical etching in the popular laser crystals yttrium aluminium garnet and sapphire can be enhanced by more than five orders of magnitude (from <0.6 nm h−1 to ~100 µm h−1) by the use of direct laser writing, before etching. The process makes it possible to produce arbitrary three-dimensional nanostructures with 100 nm feature sizes inside centimetre-scale laser crystals without brittle fracture. To showcase the potential of the technique we fabricate subwavelength diffraction gratings and nanostructured optical waveguides in yttrium aluminium garnet and millimetre-long nanopores in sapphire. The approach offers a pathway for transferring concepts from nanophotonics to the fields of solid-state lasers and crystal optics.

Controllable Fabrication of Super-Resolution Nanocrater Arrays by Laser Direct Writing.

High Throughput Laser Nano Direct Writing Technique

Subdiffraction 3D Nanolithography by Two‐Photon Two‐Step Absorption and Photoinhibition

High-resolution 3D Nanoprinting Based on Two-Step Absorption Via an Integrated Fiber-Coupled Laser Diode.

Microfabrication Assisted by Laser-Trapped Microparticle Tools

Laser Direct Writing of Graphene Nanostructures Beyond the Diffraction Limit by Graphene Oxidation

Fabrication of highly homogeneous and controllable nanogratings on silicon via chemical etching-assisted femtosecond laser modification

Large Area Uniform Nanostructures Fabricated by Direct Femtosecond Laser Ablation

Femtosecond Laser Nano-Fabrication With Extended Processing Range

Surface Nano-fabrication by Laser Precision Engineering

Nanofabrications Using A Laser Collimated And Focused Neutral Chromium Atom Beam

Three-dimensional femtosecond laser nanolithography of crystals

Fabrication of Nanostructures by Laser Optical Focusing

Rapid Production Of Large-Area Deep Sub-Wavelength Hybrid Structures By Femtosecond Laser Light-Field Tailoring

Laser-Induced Cavitation-Assisted True 3D Nano-Sculpturing of Hard Materials

Nanoscale control of non-reciprocal ripple writing

Tailored engineering of crystalline surface enabled by ion-irradiation-assisted femtosecond laser ablation

Superlens-enhanced Laser Interference Lithography

Realising high aspect ratio 10 nm feature size in laser materials processing in air at 800 nm wavelength in the far-field by creating a high purity longitudinal light field at focus

Free‐Form Micro‐Optics out of Crystals: Femtosecond Laser 3D Sculpturing

Laser nano-fabrication inside silicon with spatial beam modulation and non-local seeding