Concept and Technology for Full Monolithic MOSFET and JBS Vertical Integration in Multi-Terminal 4H-SiC Power Converters
Ralph Makhoul,Nour Beydoun,Abdelhakim Bourennane,Luong Viet Phung,Frédéric Richardeau,Mihai Lazar,Philippe Godignon,Dominique Planson,Hervé Morel,David Bourrier
DOI: https://doi.org/10.4028/p-pztj4o
2024-08-23
Solid State Phenomena
Abstract:Publication date: 21 August 2024 Source: Solid State Phenomena Vol. 358 Author(s): Ralph Makhoul, Nour Beydoun, Abdelhakim Bourennane, Luong Viet Phung, Frédéric Richardeau, Mihai Lazar, Philippe Godignon, Dominique Planson, Hervé Morel, David Bourrier New and original medium power multi-terminal SiC monolithic converter architectures are investigated with vertical switching cells based on SiC JBS diodes and VDMOS transistors. 2D TCAD and mixed-mode SentaurusTM simulations are performed to optimize switching structures as Buck, Boost, H-bridge high-side row chip common drain-type and low-side row chip common source-type. The proper operation in the turn-on and turn-off of each cell is also studied and validated. To fabricate these new monolithic integrated architectures, two main technological bricks have been developed, for vertical insulation and the integration of a top Ni metal via. To achieve the vertical insulation deep trenches are necessary combining dry plasma and wet KOH electrochemical etching through the thick N+ substrate.