Abstract:High-precision microelectromechanical system (MEMS) accelerometers have wide application in the military and civil fields. The closed-loop microaccelerometer interface circuit with switched capacitor topology has a high signal-to-noise ratio, wide bandwidth, good linearity, and easy implementation in complementary metal oxide semiconductor (CMOS) process. Aiming at the urgent need for high-precision MEMS accelerometers in geophones, we carried out relevant research on high-performance closed-loop application specific integrated circuit (ASIC) chips. According to the characteristics of the performance parameters and output signal of MEMS accelerometers used in geophones, a high-precision closed-loop interface ASIC chip based on electrostatic time-multiplexing feedback technology and proportion integration differentiation (PID) feedback control technology was designed and implemented. The interface circuit consisted of a low-noise charge-sensitive amplifier (CSA), a sampling and holding circuit, and a PID feedback circuit. We analyzed and optimized the noise characteristics of the interface circuit and used a capacitance compensation array method to eliminate misalignment of the sensitive element. The correlated double sampling (CDS) technology was used to eliminate low-frequency noise and offset of the interface circuit. The layout design and engineering batch chip were fabricated by a standard 0.35 μm CMOS process. The active area of the chip was 3.2 mm × 3 mm. We tested the performance of the accelerometer system with the following conditions: power dissipation of 7.7 mW with a 5 V power supply and noise density less than 0.5 μg/Hz1/2. The accelerometers had a sensitivity of 1.2 V/g and an input range of ±1.2 g. The nonlinearity was 0.15%, and the bias instability was about 50 μg.

Interface Circuit Of Sigma-Delta Accelerometer With On-Chip-Test Function

A Low-power High-resolution Band-pass Sigma-delta ADC for Accelerometer Applications

A Low-Power Digital Processing Circuit for Capacitive Accelerometer

High Performance Interface Circuit for MEMS Gyroscope

An In-Plane Low-Noise Accelerometer Fabricated with an Improved Process Flow

Noise Analysis and Parameter Optimization of Digital MEMS Accelerometer System

One Method to Improve the Temperature Stability of Processing Circuit of Digital Accelerometer

Temperature Bias Drift Phase-Based Compensation for a MEMS Accelerometer with Stiffness-Tuning Double-Sided Parallel Plate Capacitors

Elimination of nonlinearity in sigma delta MEMS accelerometer

A Sub-µg Bias-Instability MEMS Oscillating Accelerometer with an Ultra-Low-Noise Read-Out Circuit in CMOS

A Background Test and Calibration Technique of Nonlinear Mismatches in MEMS Oscillating Accelerometers

A Novel Mash 2-1 Sigma-Delta A/D Converter with High-To-Low Conversion for Closed-Loop Mems Accelerometer Interface

Noise analysis and characterization of a full differential CMOS interface circuit for capacitive closed-loop micro-accelerometer

Full Differential CMOS Interface Circuit for Closed-Loop Capacitive Micro-Accelerometers

Research on High-Resolution Miniaturized MEMS Accelerometer Interface ASIC

A Novel Time-Multiplexed Fully Differential Interface ASIC With Strong Nonlinear Suppression for MEMS Accelerometers

A low-noise fully-differential open-loop interface for high-G capacitive micro-accelerometers with 112.2 dB dynamic range

System-level Simulation and Implementation for a High Q Capacitive Accelerometer with PD Feedback Compensation

A High-Voltage Closed-Loop SC Interface for a ± 50 G Capacitive Micro-Accelerometer with 112.4 Db Dynamic Range

Design of Interface ASIC for Capacitive Seismic Sensor with Harmonic Distortion Self-Testing

A fully-differential, multiplex-sensing interface circuit monolithically integrated with tri-axis pure oxide capacitive CMOS-MEMS accelerometers