Abstract:High-precision microelectromechanical system (MEMS) accelerometers have wide application in the military and civil fields. The closed-loop microaccelerometer interface circuit with switched capacitor topology has a high signal-to-noise ratio, wide bandwidth, good linearity, and easy implementation in complementary metal oxide semiconductor (CMOS) process. Aiming at the urgent need for high-precision MEMS accelerometers in geophones, we carried out relevant research on high-performance closed-loop application specific integrated circuit (ASIC) chips. According to the characteristics of the performance parameters and output signal of MEMS accelerometers used in geophones, a high-precision closed-loop interface ASIC chip based on electrostatic time-multiplexing feedback technology and proportion integration differentiation (PID) feedback control technology was designed and implemented. The interface circuit consisted of a low-noise charge-sensitive amplifier (CSA), a sampling and holding circuit, and a PID feedback circuit. We analyzed and optimized the noise characteristics of the interface circuit and used a capacitance compensation array method to eliminate misalignment of the sensitive element. The correlated double sampling (CDS) technology was used to eliminate low-frequency noise and offset of the interface circuit. The layout design and engineering batch chip were fabricated by a standard 0.35 μm CMOS process. The active area of the chip was 3.2 mm × 3 mm. We tested the performance of the accelerometer system with the following conditions: power dissipation of 7.7 mW with a 5 V power supply and noise density less than 0.5 μg/Hz1/2. The accelerometers had a sensitivity of 1.2 V/g and an input range of ±1.2 g. The nonlinearity was 0.15%, and the bias instability was about 50 μg.

System-level Simulation and Implementation for a High Q Capacitive Accelerometer with PD Feedback Compensation

Design Of The Closed-Loop Capacitive Micro-Accelerometer Based On Pspice

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Design of Force-Balance Capacitive Accelerometer

A Stiffness-Tunable MEMS Accelerometer

Influence of Feedback Compensation on Dynamic Property for High-Q Capacitive Accelerometers

A High-Voltage Closed-Loop SC Interface for a ± 50 G Capacitive Micro-Accelerometer with 112.4 Db Dynamic Range

A Pseudo-Differential Capacitive MEMS Accelerometer Analog Front-End Design

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A low-noise CMOS interface circuit for closed-loop accelerometer

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Design of Readout Circuit for Capacitive Accelerometers

Modeling and Analysis of a Closed-Loop System for High-Q MEMS Accelerometer Sensor

Research on High-Resolution Miniaturized MEMS Accelerometer Interface ASIC

Low Noise Interface ASIC of Capacitive MEMS Accelerometer

A Closed-Loop Mems Accelerometer with Capacitive Sensing Interface Asic

Cmos Interface Circuitry For A Closed-Loop Capacitive Mems Accelerometer

An Offset-Compensated Switched-Capacitor Interface Circuit for Closed-Loop Mems Capacitive Accelerometer

A poly-Si based 2-axis differential capacitive-sensing accelerometer

CMOS interface circuit for closed-loop accelerometer