Full Differential CMOS Interface Circuit for Closed-Loop Capacitive Micro-Accelerometers

LIU Xiao-wei,YIN Liang,LI Hai-tao,ZHOU Zhi-ping
DOI: https://doi.org/10.3788/ope.20111903.0580
2011-01-01
Abstract:A CMOS full differential interface circuit with low noise and high linearity was presented for closed-loop capacitive micro-accelerometers.Based on switched-capacitor detection,the circuit was designed to improve its linearity by a 0.5 μm n-well CMOS process technology.The simulation result shows that the proposed two-path feedback structure provides a good system linearity of 0.01%.The optimized designed PID controller was added into the system,which decreases the stabilization error effectively,increases the system responding speed by 31%,and the linearity by 66.7%.With a ±5 V supply and a sampling frequency of 64 kHz,the circuit can offer the equivalent input noise in 8 μg·Hz-1 2,system sensitivity in 1.22 V/g,system linearity in 0.03%,and the work range in ±2 g.These results prove that this circuit is suitable for applications of high performance micro-accelerometers to seism detection,oil exploration,etc..
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