Abstract:Searching for the relationship between the nanostructure and optical properties has always been exciting the researchers in the field of optics (linear optics as well as non-linear optics), energy harvesting (anti-reflective Si solar cells, perovskite solar cells, ..., etc.), and industry (anti-reflection coating on car windows, sunglasses, etc.). In this work, we present an approach for nanostructuring the silicon substrate to silicon photonic crystals. By precisely controlling the etching time and etching path after using nanoimprint lithography, ordered arrays of inverted Si nanopyramids and Si nanopillars with good homogeneity, uniform surface roughness, high reproducibility of pattern transfer, and a controllable aspect ratio are prepared. Experimental investigation of the optical properties indicates that the reflections of these Si nanostructures are mainly determined by the aspect ratio as well as the period of nanostructures. Furthermore, we have experimentally observed visible-light scattering (V-LS) patterns on inverted Si nanopyramids and Si nanopillars, and their corresponding patterns can be precisely controlled by the patterned nanostructures. The V-LS pattern, background, and "ghost peaks" on the angle-resolved scattering results are caused by constructive interference, destructive interference, and the interference situation between both. This controllable nanopatterning on crystalline Si substrates with precisely tunable optical properties shows great potential for applications in many fields, for example, optics, electronics, and energy.

Depth-Dependent Anti-Reflection and Enhancement of Luminescence from Si Quantum Dots-Based Multilayer on Nano-Patterned Si Substrates

Enhancing Quantum Dots for Bioimaging using Advanced Surface Chemistry and Advanced Optical Microscopy: Application to Silicon Quantum Dots (SiQDs)

Simulation and Experimental Study on Anti-reflection Characteristics of Nano-patterned Si Structures for Si Quantum Dot-Based Light-Emitting Devices

Fabrication and Characterisation of Silicon Quantum Dots in SiO 2 /si 3 N 4 Hybrid Matrix

Plasmon-Enhanced Surface-State Emission of CdSe Quantum Dots and Its Application to Microscale Luminescence Patterns

Effect of Scattering from Localized Surface Plasmon Resonance on Improving the Luminescence Efficiency of Silicon Nitride Light-Emitting Devices

Fabrication and Luminescence Properties of Si Quantum Dots Based on Si-Rich Sinx/N-Rich Siny Multilayer

Localized Surface Plasmon Resonance Enhanced Photoluminescence from SiNx with Different N/Si Ratios

A luminescence enhancement approach through Si/O nanostructure

Improved Emission Efficiency of Electroluminescent Device Containing Nc-Si/sio(2) Multilayers by Using Nano-Patterned Substrate.

Light Trapping and Down‐Shifting Effect of Periodically Nanopatterned Si‐Quantum‐Dot‐Based Structures for Enhanced Photovoltaic Properties

Fabrication of Anti-reflecting Si Nano-structures with Low Aspect Ratio by Nano-sphere Lithography Technique

Electrically Driven Luminescence of Nanocrystalline Si/SiO2 Multilayers on Various Substrates

Tuning the peak position of subwavelength silica nanosphere broadband antireflection coatings.

Photoluminescence from Silicon Nanocrystals in Encapsulating Materials

Luminescence Mechanism of Ligand-induced Interface States in Silicon Quantum Dots

Electro-Luminescence from Un-Doped and Doped Nanocrystalline Si/Sio2 Multilayers

Enhanced Electroluminescence from Si Quantum Dots-Based Light-Emitting Devices with Si Nanowire Structures and Hydrogen Passivation

Advanced Optoelectronic Devices Based on Si Quantum Dots/Si Nanowires Hetero-structures

Tailoring Patterned Visible-Light Scattering by Silicon Photonic Crystals

Surface-Plasmon-Enhanced photoluminescence from Nano-Porous Silicon Layer