1207cm 1 infrared absorption band in carbon-rich silicon crystal

Lin Chen,Xuegong Yu,Peng Chen,Xin Gu,Jinggang Lü,Deren Yang
DOI: https://doi.org/10.4028/www.scientific.net/SSP.178-179.172
2011-01-01
Solid State Phenomena
Abstract:Silicon wafers with different carbon contents have been characterized by Fourier transform infrared spectroscopy technique. An infrared absorption band at 1207cm(-1) can be newly observed in the case of carbon content being above 1.7 x 10(17)/cm(3), whose intensity increases with an increase of carbon concentration in silicon crystal. More interestingly, the 1207cm(-1) band cannot be influenced by the long-time annealing in the temperature range of 450-1250 degrees C, suggesting the high thermal stability of this carbon-related defect, which might be related to the presence of silicon carbide in silicon crystals.
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