Mechanical properties evaluation of diamond films via nanoindentation
Jiaji Xiong,Lusheng Liu,Haozhe Song,Mengrui Wang,Tianwen Hu,Zhaofeng Zhai,Bing Yang,Xin Jiang,Nan Huang
DOI: https://doi.org/10.1016/j.diamond.2022.109403
IF: 3.806
2022-12-01
Diamond and Related Materials
Abstract:Diamond film is considered ideal tool coating material for processing difficult-to-machine materials due to the high hardness and wear resistance. However, precisely evaluating the mechanical properties of diamond films has been a considerable obstacle, which hinders further design and application. In this work, various diamond films were deposited on cemented carbide substrates ranging from 0.1 to 1.0 kPa in CH4/H2 by hot filament chemical vapor deposition. The mechanical properties of diamond films were systematically and rigorously evaluated by nanoindentation adopting a series of loads. However, it is found that hardness calculated at different loads has a significant deviation, although all obey the well-known 10 % rule of thumb. On basis of the massive nanoindentation on polished diamond film with roughness <20 nm, we propose a stricter 5 %, instead of the well-known 10 % rule of thumb, for the limit of maximum penetration depth divided by film thickness in the diamond nanoindentation measurements. Notably, the mechanical properties of the deposited diamond films improved as the pressure increased, especially hardness gradually increased from 75.5 ± 1.4 GPa to 87.3 ± 5.0 GPa, which is attributed to the increase of the ratio of sp3 carbon content.
materials science, multidisciplinary,physics, applied, condensed matter, coatings & films