Interfacial adhesion analysis of Pb(Zr0.52Ti0.48)O3 (PZT) thin films by nano-indentation test

X.J. Zheng,Y.C. Zhou,J.M. Liu,A.D. Li
DOI: https://doi.org/10.1016/S0375-9601(02)01316-6
IF: 2.707
2002-01-01
Physics Letters A
Abstract:A beam model, in which the piezoelectric effect is taken into account by the general constitutive equation, is proposed to assess the interfacial adhesion of Pb(Zr0.52Ti0.48)O3 (PZT) thin film by nano-indentation method. Interfacial adhesion for PZT thin films with thickness of 350 nm and 500 nm are indirectly measured in the range of 3.399∼52.432 J/m2.
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