Use of Nanomechanical Fracture-Testing for Determining the Interfacial Adhesion of PZT Ferroelectric Thin Films

XJ Zheng,YC Zhou,JM Liu,AD Li
DOI: https://doi.org/10.1016/s0257-8972(02)00883-6
2003-01-01
Abstract:The nano-indentation and nano-scratch fracture of Pb(Ti0.48Zr0.52)O3 (PZT) ferroelectric thin films deposited by solution–gelatin chemistry (sol–gel) were investigated using a three-sided and conical indenter, respectively. The interfacial adhesion property of thin films was characterized by the critical strain energy release rate in the nano-mechanical fracture test. The interfacial adhesion of PZT thin films assessed by nano-indentation and nano-scratch fracture models are in good agreement. For PZT ferroelectric thin films with thickness 350 nm, the interfacial adhesion was found to be 0.921–35.468 J/m2. The averaged elastic modulus and indentation hardness are 120.95 and 13 GPa, respectively.
What problem does this paper attempt to address?