Testing and Analysis of Mechanical-Electrical-Magnetic CouplingCharacteristics of PbZr0.52Ti0.48O3/Ni Thin Film Based on Bulge Test Method

Qi LIU,Chang-zhen SUN,Yuan-dong HE,Hao XU,Ze-jun YU,Wei-guo MAO,Yong-mao PEI,Dai-ning FANG
DOI: https://doi.org/10.12061/j.issn.2095-6223.2017.010801
2017-01-01
Abstract:PZT and PZT/Ni thin film materials were prepared by sol-gel method, ion beam magnetron sputtering method,and chemical etching method.Mechanical-electrical-magnetic properties of PZT/Ni film were measured by self-developed bugle test system.The structure of PZT/Ni film was examined by XRD.It was found that the elastic modulus of PZT film firstly increased and then gradually decreased with the increasing of applied electric field.The corresponding magnetic coercive field increased of 33.4%.With the increase of the oil pressure, the residual polarization and coercive field of PZT thin films increased of 17.1% and 32.1%,respectively.The magnetic coercivity field of PZT/Ni composite films increased of 46.1%.
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