Identifying the elastoplastic properties of ductile film on hard substrate by nanoindentation

Xuegang Xing,Yongsheng Wang,Gesheng Xiao,Xuefeng Shu,Shengwang Yu,Yucheng Wu
DOI: https://doi.org/10.1016/j.vacuum.2021.110252
IF: 4
2021-07-01
Vacuum
Abstract:<p>Nanoindentation analysis was proposed on a ductile film/hard substrate system to extract the elastoplastic properties of thin film. Based on the dimensional analysis method (DAM), relationships between the indentation responses and film/substrate elastoplastic properties were established. Reverse analysis algorithms were proposed by introducing the substrate effects, which could provide sufficient information at different indentation depths to solve the dimensional equations. Numerical and instrumental indentations were carried out on a titanium film/alumina ceramic substrate system to verify the proposed reverse method, by which the elastic modulus, yield stress and work hardening exponent of the film were successfully obtained.</p>
materials science, multidisciplinary,physics, applied
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