Preparation of BaTiO3 Dielectric Film via Micro-Arc Oxidation and Surface Morphology of the Product

Wang Min,Guo Hui-yong,Huang Wen-bo,Li Wen-fang,Zhang Guo-ge

DOI: https://doi.org/10.3969/j.issn.1000-565X.2011.11.020

2011-01-01

Abstract:Barium titanate film with good surface morphology and small surface roughness was prepared via micro-arc oxidation, and the corresponding preparation parameters were optimized by orthogonal test. Then, the film prepared under the optimal conditions was characterized, and the influences of solution concentration, current frequency, current density and reaction time on the surface morphology and roughness of the film were investigated. The results show that, under the optimal conditions, namely a Ba(OH) 2 solution concentration of 0.5 mol/L, a current frequency of 100 Hz, a current density of 2.0 A/cm 2 and a reaction duration of 5 min, the prepared film is mainly composed of tetragonal BaTiO 3 and is of high dielectric constant (113.0) at 1 kHz, that the surface roughness of the film decreases with the increase of solution concentration and current frequency (less than 150 Hz) and with the decrease of current density and reaction time.