Electrophoretic deposition of BaTiO3 based X7R dielectric film

JL Zhao,XH Wang,RZ Chen,ZL Gui,LT Li
2003-01-01
Rare Metal Materials and Engineering
Abstract:BaTiO3 based X7R dielectric film was fabricated on Ni electrode using electrophoretic deposition (EPD) technique in our work. Solvent kinds, different solvent ratio, electric field strength, deposition time and solid concentration in the suspension were studied with respect to their effect on density and uniformity of the dielectric film. Acetone and isopropanol with volume ration of 4:6 was optimum solvent to deposit BaTiO3 based X7R film. Suitable sintering parameters with a temperature rise rate at 60degreesC/h and a temperature decrease rate at 50degreesC/h were adopted to get uniform and dense films between 2 mu msimilar to20 mu m.
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