Abstract:This work analyses circuit phase delay for carrier-modulation MEMS capacitive gyroscopes. The temperature-dependent circuit phase delay is a major source of gyroscope output drift, which deteriorates the gyroscope bias instability (BI) and angle random walk (ARW). Effects of both drive-mode and sense-mode circuit phase delay on gyroscope performance when using different signal extraction architectures are analyzed in detail. The online suppression method which combines the so-called modified double sideband (MDSB) extraction architecture in the gyroscope drive mode and closed-loop force-rebalance loop in the sense mode can eliminate the impact of residual fluctuation error of circuit phase delay in real time. When drive-mode circuit phase delay equivalently varies from -20 degrees to 20 degrees, using MDSB decreases the fluctuation of the open-loop zero-rate output (ZRO) by 70% compared to using double sideband (DSB) and by 99.7% with respect to using single sideband (SSB). Meanwhile, improvement for the closed-loop ZRO using MDSB is 92.48% and 94% compared to cases using DSB and SSB, respectively. Furthermore, when the equivalent circuit phase delay of the sense-mode alters from -20 degrees to 20 degrees, ZRO variation for the gyroscope with force rebalanced sense loop and quadrature stiffness nulling loop decreases by 80% in contrast to the case with open loop, which demonstrates the effectiveness of online suppression for circuit phase delay of both the drive-mode and sense-mode. Using the online suppression method, the gyroscope has achieved a BI of 0.16 degrees h(-1) and ARW of 0.011 degrees (root h)(-1). Furthermore, using the MDSB in the drive mode obtains the best stability compared to using the DSB and SSB as the temperature changes.

Capacitor Mismatch Auto-Compensation For Mems Gyroscope Differential Capacitive Sensing Circuit

A Capacitive Interface Circuit with Capacitor Mismatch Auto-compensation for MEMS Gyroscope.

A control and readout circuit with capacitive mismatch auto-compensation for MEMS vibratory gyroscope

A Robust Triangular-Electrode Based Capacitive Detection Method For Mems Gyroscopes

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Effects Of Both The Drive- And Sense-Mode Circuit Phase Delay On Mems Gyroscope Performance And Real-Time Suppression Of The Residual Fluctuation Phase Error

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An Improved Phase-Robust Configuration for Vibration Amplitude-Phase Extraction for Capacitive MEMS Gyroscopes

Temperature Bias Drift Phase-Based Compensation for a MEMS Accelerometer with Stiffness-Tuning Double-Sided Parallel Plate Capacitors

Performance Improvement for MEMS Gyroscopes by Suppressing the Circuit Phase Delay

Temperature-dependence improvement for a MEMS gyroscope using triangular-electrode based capacitive detection method

Linear Parametric Amplification/attenuation for MEMS Vibratory Gyroscopes Based on Triangular Area-Varying Capacitors

An Offset-Compensated Switched-Capacitor Interface Circuit for Closed-Loop Mems Capacitive Accelerometer

Differential Capacitance Detection Circuit Design Based on the Sigma-Delta Technology

Design of a Novel Micromachined Gyroscope with Compensatory Capacitance

Cmos Interface Circuitry For A Closed-Loop Capacitive Mems Accelerometer

Analysis and Optimization of a Diode-Bridge Based Differential Capacitance Readout Circuit for MEMS Gyroscopes

An In-Run Automatic Demodulation Phase Error Compensation Method for MEMS Gyroscope in Full Temperature Range

A Low-noise High-voltage Interface Circuit for Capacitive MEMS Gyroscope.