Atomic structure study of the initial stage of diamond deposition on cluster models for 6H-SiC(0001) surface

Naichao Chen,Fanghong Sun
2010-01-01
Abstract:Structure and energy related properties of carbon atoms deposited on cluster models for 6H-SiC(0001) surface with and without H-presence were investigated by the first-principles calculation. The calculated geometry optimization and their structural energies show that 6H-SiC(0001) surfaces with fully H-presence are favorable for the diamond growth. The diamond deposition of directional selectivity tends to the cross orientation. For the surface reconstruction with dangling bonds, the graphite is likely to develop fast on the 6H-SiC(0001) surface layer in the initial of 1/4 C MLs structure. From the chemical potential analysis, the calculations indicate that, for all of the 1/2 C MLs structures with H-presence, the 1/2 C MLs cross structure is the only one favorable stability of surface reconstruction in the process of the initial stage of CVD diamond growth. The surface reconstructions with dangling bonds have the 1/2 C MLs cross and row structures. The results collectively illustrate that deposition by increasing the hydrogen bonds to the 6H-SiC(0001) surfaces contributes to form the stable CVD diamond formation.
What problem does this paper attempt to address?