Microporous SiO2-based Solid Electrolyte with Improved Polarization Response for 0.8 V Transparent Thin-Film Transistors

Jia Sun,Jie Jiang,Aixia Lu,Qing Wan
DOI: https://doi.org/10.1088/0022-3727/43/29/295103
2010-01-01
Abstract:The polarization mechanism of a microporous SiO2-based solid electrolyte is developed and three polarizations (electric double layer formation, ionic relaxation and dipole relaxation) are identified. The polarization response of the microporous SiO2-based solid electrolyte is optimized by tuning the deposition temperature and the improved specific capacitance is 1 µF cm−2 at 1 kHz and remains above 0.6 µF cm−2 even at 10 kHz. Ultralow-voltage transparent In–Zn–O thin-film transistors (TFTs) gated by such dielectrics are fabricated at low temperatures. The field-effect mobility, current on/off ratio and subthreshold swing are estimated to be 46.2 cm2 V−1 s−1, ∼106 and 69 mV/decade, respectively. Such TFTs hold promise for portable electronic applications.
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