Preparation and Mechanical Properties of Nanoporous SiO_2/PI Hybrid Film Derived from Base Catalyzed TEOS

TIAN Jing,ZHANG Jin,ZHAO He-yun,LIU Qin-ju
2010-01-01
Journal of Functional Biomaterials
Abstract:The nanoporous SiO2/PI hybrid thin film and the surface transition layer were prepared on silicon wafers via adopting base catalyzed TEOS sol-gel method,molecular template and spinning coating.The films were analyzed and characterized by DSC-TGA,AFM,Atomic Profiler method and Universal Nano+Micro Mechanical Tester.The results show that the nanoporous SiO2/PI hybrid thin film has good thermal stability and mechanical property.The average thickness of one-layer and two-layer film is 917 and 1288nm,respectively.The surface transition layer makes the film surface smoothness greatly improve and the dynamic friction coefficient decrease.
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