Abstract:Optical coupling between subwavelength grating pairs allows for the precise measurement of lateral or vertical displacement of grating elements and gives rise to different types of displacement and inertial sensors. In this paper, we demonstrate a design for a nano-optomechanical accelerometer based on a subwavelength grating pair that can be easily fabricated by a single Silicon-on-insulator (SOI) chip. The parameters of the subwavelength grating pair-based optical readout, including period, duty cycle, thickness of grating and metal film, and the distance of the air gap, were optimized by combining a genetic algorithm and rigorous coupled wavelength analysis (RCWA) to obtain the optimal sensitivity to the displacement of suspended grating element and the acceleration. A corresponding mechanical design was also completed to meet the highly sensitive acceleration measurement requirement while considering the mechanical cross-axis sensitivity, dynamic range, bandwidth, and fabrication feasibility. This device was verified by both RCWA and finite-different-time-domain methods, and a tolerance analysis was also completed to confirm that it is able to achieve the extremely high optical displacement sensitivity of 1.8%/nm, acceleration-displacement sensitivity of 1.56 nm/mg, and acceleration measurement sensitivity of more than 2.5%/mg, which is almost one order of magnitude higher than any reported counterparts. This work enables a single SOI-based high performance accelerometer, and provides a theoretical basis and fabrication guides for the design.

SOI Micro-Accelerometer Fabricated with Anti-Footing Technique

Thin Layer Soi-Fets Used for Stress-Sensing and Its Application in Accelerometers

The Method of Prevent Footing Effect in Making SOI Micro-Mechanical Structure

An In-Plane Low-Noise Accelerometer Fabricated with an Improved Process Flow

Monolithic Integrated Micro-Opto-Electromechanical Accelerometer Based on Michelson Interferometer Structure

Single Chip-Based Nano-Optomechanical Accelerometer Based on Subwavelength Grating Pair and Rotated Serpentine Springs

A MOEMS Accelerometer Based on Diffraction Grating with Improved Mechanical Structure.

Fabrication of SOI MEMS Inertial Sensors with Dry Releasing Process

Mechanical Design Optimization of A Single-Axis Moems Accelerometer Based on A Grating Interferometry Cavity for Ultrahigh Sensitivity

Design, fabrication and testing of a SOI accelerometer

A single-mask dry-release process for fabrication of high aspect ratio SOI MEMS devices

A Compact Micromachined Interferometric Accelerometer Based on the Diffraction Grating

Fabrication and characterization of SiO2 microcantilever for microsensor application

Design and Fabrication of a Micro-Electromechanical System Sandwich Capacitive Accelerometer

A novel capacitive accelerometer with an eight-beam-mass structure by self-stop anisotropic etching of (1 0 0) silicon

Micromachined Interferometric Accelerometer Fabricated Using SGADER Process

Design, Optimization, and Realization of a High Performance MOEMS Accelerometer from a Double-Device-Layer SOI Wafer (vol 26, Pg 859, 2017)

A novel sandwich capacitive accelerometer with a symmetrical structure fabricated from a D-SOI wafer

Fabrication of a MEMS Capacitive Accelerometer with Symmetrical Double-Sided Serpentine Beam-Mass Structure

A MEMS Sandwich Differential Capacitive Silicon-on-insulator Accelerometer

Design and Fabrication of a Mems Capacitive Accelerometer Based on Double-Device-layers SOI Wafer.