Abstract:Cross-axis sensitivity of single-axis optomechanical accelerometers, mainly caused by the asymmetric structural design, is an essential issue primarily for high performance applications, which has not been systematically researched. This paper investigates the generating mechanism and detrimental effects of the cross-axis sensitivity of a high resoluion single-axis optomechanical accelerometer, which is composed of a grating-based cavity and an acceleration sensing chip consisting of four crab-shaped cantilevers and a proof mass. The modified design has been proposed and a prototype setup has been built based on the model of cross-axis sensitivity in optomechanical accelerometers. The characterization of the cross-axis sensitivity of a specific optomechanical accelerometer is quantitatively discussed for both mechanical and optical components by numerical simulation and theoretical analysis in this work. The analysis indicates that the cross-axis sensitivity decreases the contrast ratio of the interference signal and the acceleration sensitivity, as well as giving rise to an additional optical path difference, which would impact the accuracy of the accelerometer. The improved mechanical design is achieved by double side etching on a specific double-substrate-layer silicon-on-insulator (SOI) wafer to move the center of the proof mass to the support plane. The experimental results demonstrate that the modified design with highly symmetrical structure can suppress the cross-axis sensitivity significantly without compromising the sensitivity and resolution. The cross-axis sensitivity defined by the contrast ratio of the output signal drops to 2.19%/0.1g from 28.28%/0.1g under the premise that the acceleration sensitivity of this single-axis optomechanical accelerometer remains 1162.45V/g and the resolution remains 1.325 mu g. (C) 2016 Optical Society of America

Design, Optimization, and Realization of a High Performance MOEMS Accelerometer from a Double-Device-Layer SOI Wafer (vol 26, Pg 859, 2017)

Monolithic Integrated Cavity Optomechanical Accelerometer Based on Push-Pull Photonic Crystal Zipper Cavity

Mechanical Design Optimization of A Single-Axis Moems Accelerometer Based on A Grating Interferometry Cavity for Ultrahigh Sensitivity

A MOEMS Accelerometer Based on Diffraction Grating with Improved Mechanical Structure.

Monolithic Integrated Micro-Opto-Electromechanical Accelerometer Based on Michelson Interferometer Structure

Analysis and Amelioration about the Cross-Sensitivity of A High Resolution Moems Accelerometer Based on Diffraction Grating

Single Chip-Based Nano-Optomechanical Accelerometer Based on Subwavelength Grating Pair and Rotated Serpentine Springs

Optical Design and Analysis of a High Resolution MOEMS Accelerometer Based on Diffraction Grating

Thin Layer Soi-Fets Used for Stress-Sensing and Its Application in Accelerometers

A Stiffness-Tunable MEMS Accelerometer

A Novel Scheme Design of a High-G Optical NEMS Accelerometer Based on a Single Chip Grating with Proper Sensitivity and Large Bandwidth

Minimizing cross-axis sensitivity in grating-based optomechanical accelerometers.

An In-Plane Low-Noise Accelerometer Fabricated with an Improved Process Flow

Design and Fabrication of a Mems Capacitive Accelerometer Based on Double-Device-layers SOI Wafer.

SOI Micro-Accelerometer Fabricated with Anti-Footing Technique

Design and Fabrication of a Micro-Electromechanical System Sandwich Capacitive Accelerometer

A Sub-µg Bias-Instability MEMS Oscillating Accelerometer with an Ultra-Low-Noise Read-Out Circuit in CMOS

Design, fabrication and testing of a SOI accelerometer

Improvement of CMOS-MEMS accelerometer using the symmetric layers stacking design

A novel sandwich capacitive accelerometer with a symmetrical structure fabricated from a D-SOI wafer

Design and experiment of push-pull MEMS Resonant Accelerometers