Abstract:Femtosecond laser processing technology is an advanced sub-micro-processing technique that enables the non-contact processing of various materials. This technology can be used to apply sub-micro structures for purposes such as hydrophilicity enhancement, optical transmittance improvement, and photonics detection. However, when it comes to processing micro/nanostructures on highly brittle materials using femtosecond lasers, there are challenges such as low processing efficiency, generation of debris, and microcracking. In this paper, we propose a method called the out-of-focus femtosecond laser direct writing technique combined with wet etching. This method offers simplicity, speed, and flexibility in preparing dense, large-area sub-microstructured surfaces on the brittle material sapphire. Our detailed investigation focuses on the impact of laser processing parameters (direct writing period, distance of focusing, direct writing speed, etc.) on the sub-microstructures of Al2O3 surfaces. The results demonstrate that this method successfully creates embedded sub-microstructures on the sapphire surface. The microholes, with a diameter of approximately 2.0 μm, contain sub-micro structures with a minimum width of 250 ± 20 nm. Additionally, we conducted experiments to assess the optical transmittance of sapphire nanostructures in the range of 350–1200 nm, which exhibited an average transmittance of approximately 77.0%. The water contact angle (CA) test yielded a result of 52 ± 2°, indicating an enhancement in the hydrophilicity of the sapphire nanostructures with only a slight reduction in optical transmittance. Our efficient fabrication of sub-microstructures on the sapphire surface of highly brittle materials offers a promising method for the production and application of brittle materials in the field of micro-optics.

Laser micro-structuring of sapphire wafer and fiber

Sub-diffraction-limit fabrication of sapphire by femtosecond laser direct writing

A Method for Preparing Surface Sub-Microstructures on Sapphire Surfaces Using Femtosecond Laser Processing Technology

FEMTOSECOND LASER SCRIBING OF SAPPHIRE AT WAVELENGTH 1040 AND 520 NM

Investigation on sapphire ablation by femtosecond-nanosecond dual beam laser

Femtosecond Laser-Based Micromachining of Rotational-Symmetric Sapphire Workpieces

Picosecond Laser Ablation of Millimeter-Wave Subwavelength Structures on Alumina and Sapphire

Material removal and surface formation mechanism of C-plane sapphire in multipass ablation by a nanosecond UV laser

Biomimetic sapphire windows enabled by inside-out femtosecond laser deep-scribing

Three-dimensional femtosecond laser nanolithography of crystals

Femtosecond Laser Micro-Machining of Three-Dimensional Surface Profiles on Flat Single Crystal Sapphire

Research on sapphire micro-blind-hole machining based on femtosecond laser

Fabrication of an Anti-Reflective Microstructure on Sapphire by Femtosecond Laser Direct Writing.

Surface micro-texture on sapphire fabricated by laser ablation trajectory regulation

Broadband, millimeter-wave anti-reflective structures on sapphire ablated with femto-second laser

Laser-Induced Cavitation-Assisted True 3D Nano-Sculpturing of Hard Materials

The bacillus spore coat.

Free‐Form Micro‐Optics out of Crystals: Femtosecond Laser 3D Sculpturing

Laser Direct Writing for Micromachining of Freeform Surface on n-Type GaAs via Photoelectrochemical Etching

Surface microstructuring of single crystalline diamond based on the accumulated energy homogenization in the nanosecond pulsed laser ablation

Thermal and optical properties of the femtosecond-laser-structured and stress-induced birefringent regions in sapphire