Abstract:Femtosecond laser processing technology is an advanced sub-micro-processing technique that enables the non-contact processing of various materials. This technology can be used to apply sub-micro structures for purposes such as hydrophilicity enhancement, optical transmittance improvement, and photonics detection. However, when it comes to processing micro/nanostructures on highly brittle materials using femtosecond lasers, there are challenges such as low processing efficiency, generation of debris, and microcracking. In this paper, we propose a method called the out-of-focus femtosecond laser direct writing technique combined with wet etching. This method offers simplicity, speed, and flexibility in preparing dense, large-area sub-microstructured surfaces on the brittle material sapphire. Our detailed investigation focuses on the impact of laser processing parameters (direct writing period, distance of focusing, direct writing speed, etc.) on the sub-microstructures of Al2O3 surfaces. The results demonstrate that this method successfully creates embedded sub-microstructures on the sapphire surface. The microholes, with a diameter of approximately 2.0 μm, contain sub-micro structures with a minimum width of 250 ± 20 nm. Additionally, we conducted experiments to assess the optical transmittance of sapphire nanostructures in the range of 350–1200 nm, which exhibited an average transmittance of approximately 77.0%. The water contact angle (CA) test yielded a result of 52 ± 2°, indicating an enhancement in the hydrophilicity of the sapphire nanostructures with only a slight reduction in optical transmittance. Our efficient fabrication of sub-microstructures on the sapphire surface of highly brittle materials offers a promising method for the production and application of brittle materials in the field of micro-optics.

Broadband, millimeter-wave anti-reflective structures on sapphire ablated with femto-second laser

Millimeter-Wave Broadband Anti-Reflection Coatings Using Laser Ablation of Sub-Wavelength Structures

Fabrication of an Anti-Reflective Microstructure on Sapphire by Femtosecond Laser Direct Writing.

Picosecond Laser Ablation of Millimeter-Wave Subwavelength Structures on Alumina and Sapphire

Hard Antireflective Coatings in the Visible Band

Wide-angle Broadband Antireflection Coatings with Nano-Taper Hydrated Alumina Film.

Design of Ultrabroadband Double-Chirped Mirror Pairs for Ultrafast Lasers

Anti-reflection coating with mullite and Duroid for large-diameter cryogenic sapphire and alumina optics

FEMTOSECOND LASER SCRIBING OF SAPPHIRE AT WAVELENGTH 1040 AND 520 NM

Broadband plasma spray anti-reflection coating technology for millimeter-wave astrophysics

Biomimetic sapphire windows enabled by inside-out femtosecond laser deep-scribing

Sub-diffraction-limit fabrication of sapphire by femtosecond laser direct writing

A Method for Preparing Surface Sub-Microstructures on Sapphire Surfaces Using Femtosecond Laser Processing Technology

Broadband Multi-layer Anti-reflection Coatings with Mullite and Duroid for Half-wave Plates and Alumina Filters for CMB Polarimetry

Investigation on sapphire ablation by femtosecond-nanosecond dual beam laser

Femtosecond Laser-Based Micromachining of Rotational-Symmetric Sapphire Workpieces

Surface micro-texture on sapphire fabricated by laser ablation trajectory regulation

Imaging with Diffractive Axicons Rapidly Milled on Sapphire by Femtosecond Laser Ablation

Femtosecond laser plane-by-plane inscription of Bragg gratings in sapphire fiber

Sapphire-Based Fresnel Zone Plate Fabricated by Femtosecond Laser Direct Writing and Wet Etching