Dielectric, Ferroelectric and Optical Properties of BaZr 0.2 Ti 0.8 O 3 Thin Films Prepared by Sol–gel-Hydrothermal Process

J. B. Xu,B. Shen,J. W. Zhai

DOI: https://doi.org/10.1007/s10971-010-2259-9

2010-01-01

Journal of Sol-Gel Science and Technology

Abstract:BaZr0.2Ti0.8O3 thin films on Pt/Ti/SiO2/Si substrates have been fabricated under low temperature conditions by a sol–gel-hydrothermal technique. The dielectric constant is 247–83 in the frequency range of 1 kHz–1 MHz. The corresponding dielectric loss is ~10−2. The capacitance–voltage curve shows strong non-linear dielectric behavior leading to a high tunability, up to ~30% at 1 kHz. The remanent polarization and coercive field at room temperature are measured to be ~1.5 μC/cm2 and ~90 kV/cm. The infrared optical properties of the thin films are investigated using an infrared spectroscopic ellipsometry in the wave number range of 800–4,000 cm−1. Optical constants of the thin films are simultaneously obtained.