Study of Techniques for Improving Back-Contact of CuO-nanowire Emitters in a Microstructure

Zhan, R.Z.,Jun Chen,Deng, S.Z.,Xu, N.S.
DOI: https://doi.org/10.1109/ivnc.2009.5271699
2009-01-01
Abstract:In this study, the fabrication technologies for a gated CuO nanowire emitter were investigated. It is found that the interlayer between CuO nanoemitter and cathode electrode is crucial to achieve good emission. Attempts were made to improve the interlayer structure, including using multilayer-metal thin film electrode and etch residue cleaning.
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