A Synchronism Phase-shifting Interferometry for On-line Precision Surface Measurement

Liu Xiaojun,Wang Yimin
DOI: https://doi.org/10.3321/j.issn:1004-132X.2009.18.016
2009-01-01
Abstract:Based on Twyman-Green laser wave interference principle and polarized phase shifting technology, synchronism phase-shifting interference technology was put forward, and a synchronism phase-shifting interferometry with excellent anti-vibraion characterisics was investigated, so that on-line precision surface measurement and quality monitoring problem can be solved. The synchronism phase-shifting interference principle for surface measurement was introduced, its anti-vibration characteristics was analyzed, an experimental system was setup, and testing experiences were conducted. Analysis and experimental testing results show that the synchronism phase-shifting wave interferometry is suitable for on-line precision surface measurement.
What problem does this paper attempt to address?