Research on phase-shifting interferometry contrast three-dimensional topography of ultra precision surface

Tong Xiaolei,Li Yuhe,Lin Haoshan,Qi Xin
2009-01-01
JOURNAL OF ELECTRONIC MEASUREMENT AND INSTRUMENT
Abstract:The detection of ultra-precision surface has already been an important component of the ultra-precision measurement technique. In this paper, a phase-shifting interferometry method for three-dimensional (3D) topography of ultra-precision surface was proposed. The detection system in which polarization prism is introduced, builds a phase-shifting interference analyzer reconstruction and 3D morphology model, and uses the four phase-shift method and center line to calculate phase profile and roughness parameters. A image processing and system testing software was programmed. The experimental results of standard samples show that the repeatability of roughness is 2.8nm, the test system has a strong anti-interference ability, good stability, etc.
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