Abstract:Diamond-like carbon (DLC), which used to describe a wide range of amorphous carbon films containing sp(3) bond, has been extensively studied and applied in the fields of mechanics, electronics, optics and medicine, due to their excellent properties, such as high hardness and wear resistance, low friction coefficient, high chemical inertness, low expansion coefficient, well biocompatibility, and so on. However, high internal stress and low thermal stability are the main problems in applications of DLC. On the one hand, high internal stress is generated in the growth process of DLC, which greatly reduces the adhesion strength of the film to substrate, making the film easily delaminate from the substrate. On the other hand, the DLC will graphitize and be obviously oxidized when the temperature is over 350 degrees C, leading to the deterioration of properties evidently. Non-metal N has strong affinity with transition metal Cr and their compound CrN has high hardness and oxidation resistance. So it is expected that composite film with hard CrN crystalline phase imbedded within DLC amorphous matrix maybe obtained by doping N and Cr simultaneously.In this paper, the uniform, smooth and dense C-N-Cr films with different compositions were deposited on cemented carbide substrate at different nitrogen flow rates by pulsed bias arc ion plating. The surface morphology, composition, structure and properties of C-N-Cr films were investigated by SEM, GIXRD, XPS, Raman spectra and Nano-indentation, respectively. The results show that the nitrogen content in the C-N-Cr films increases linearly and then slowly with nitrogen flow rate increasing, while the Cr content first keeps stable and then decreases linearly. The C-N-Cr films have high hardness (>30 GPa) and elastic modulus (>500 GPa) when the nitrogen flow rate is not more than 20 mL/min, above which the hardness and elastic modulus decrease drastically and only have the value of 13.6 and 190.8 GPa when the nitrogen flow rate is 100 mL/min.

Composition, Microstructure and Properties of C-N-Cr Films Deposited by Pulsed Bias Arc Ion Plating

Composition, Structure and Properties of CrAlN-DLC Hard Composite Films Deposited by Arc Ion Plating

Microstructure and Mechanical Properties of Dlc Films Doped with High Crystallinity Crn Nanoparticles

Influences of Nitrogen Flow Rate on the Structures and Properties of Ti and N Co-Doped Diamond-Like Carbon Films Deposited by Arc Ion Plating

Diamond-like Carbon Film on 20 CrNiMo Steel Prepared by Hollow-Cathode Glow Discharge

Composition, Microstructure and Properties of C-N-V Films Prepared by Pulsed Bias Arc Ion Plating

Influence of Nitrogen Flow Rate on the Microstructure and Properties of N and Me (me=cr, Zr) Co-doped Diamond-like Carbon Films

Structure and Properties of Zrn Doped Diamondlike Carbon Films Prepared by Pulsed Bias Arc Ion Plating

Effect of Nitrogen Content on the Microstructure and Properties of Cnx Films Deposited by Pulsed Bias Arc Ion Plating

Structure and Mechanical Performance of Nitrogen Doped Diamond-like Carbon Films

Nitrogen diffusion mechanism, microstructure and mechanical properties of thick Cr/CrN multilayer prepared by arc deposition system

Influence of Deposition Parameters on the Microstructure and Properties of Nitrogen-Doped Diamondlike Carbon Films

Investigation on CN X Films Deposited by Pulsed Bias Arc Ion Plating

Synthesis of Nitrogen-Doped Diamond-Like Carbon Films Produced by Plasma-Enhanced Chemical Vapor Deposition and Their Tribocorrosion Behavior in Hanks’ Solution

Structure and mechanical properties of CrN thick films deposited by high-rate medium-frequency magnetron sputtering

Superhard C1-x-yNxZry Composite Films Prepared by Pulsed Bias Arc Ion Plating

The properties of N-doped diamond-like carbon films prepared by helicon wave plasma chemical vapor deposition

Growth of CrN Films by Plasma Ion Implantation & Deposition Based on High Power Pulsed Magnetron Discharge

V and N Co-Doped Diamond-Like Carbon Films Deposited by Pulsed Bias Arc Ion Plating

Electrodeposition, microstructure and tribological performance of Ni/(N) incorporated diamond-like carbon films

Development and Characterization of CrN Films by Ion Beam Enhanced Deposition for Improved Wear Resistance